Maximum effectiveness of electrostatic energy harvesters when coupled to interface circuits

IEEE Transactions on Circuits and Systems I: Regular Papers

Volumn 59, Issue 12, 2012, Pages 3098-3111

  Mitcheson, Paul D ^a   Green, Tim C ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Electrostatic transducer; energy harvesting; vibration to electric energy conversion

Indexed keywords

COUPLED CIRCUITS; ELECTROSTATIC GENERATORS; ENERGY HARVESTING; SEMICONDUCTOR DEVICES; TIMING CIRCUITS; TRANSDUCERS;

ELECTRIC ENERGY CONVERSION; ELECTROMAGNETIC FORCES; ELECTROSTATIC ENERGIES; ELECTROSTATIC TRANSDUCERS; ENERGY HARVESTING DEVICE; INTERFACE CIRCUITS; ORDERS OF MAGNITUDE; VARIABLE CAPACITOR;

ELECTROSTATIC FORCE;

EID: 84870541389     PISSN: 15498328     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCSI.2012.2206432     Document Type: Article

References (36)

1. D. Arnold, "Review of microscale magnetic power generation, " IEEE Trans. Magn., vol. 43, no. 11, pp. 3940-3951, Nov. 2007.
2. P. D. Mitcheson, T. Sterken, C. He, M. Kiziroglou, E. M. Yeatman, and R. Puers, "Electrostatic Microgenerators, " Measurement Contr., vol. 41, pp. 114-119, 2008.
3. P. D. Mitcheson, P. Miao, B. H. Stark, E. M. Yeatman, A. S. Holmes, and T. C. Green, "MEMS electrostatic micro-power generator for low frequency operation, " Sens. Actuators, Part A, vol. 115, no. 2-3, pp. 523-529, 2004.
4. R. Amirtharajah, S. Meninger, J. O. Mur-Miranda, A. P. Chandrakasan, and J. H. Lang, "A micropower programmable DSP powered using a MEMS-based vibration-to-Electric energy converter, " in Proc. IEEE Int. Conf. Solid State Circuits, 2000, pp. 362-363. (Pubitemid 32864178)
5. T. M. Kamel, R. Elfrink, M. Renaud, D. Hohlfeld, M. Goedbloed, C. de Nooijer, M. Jambunathan, and R. van Schaijk, "Modelling and characterisation of MEMS-based piezoelectric harvesting devices, " J. Micromech. Microeng., vol. 20, pp. 1-14, Sep. 2010.
6. Y. Lui, K. L. Ren, H. F. Hofmann, andQ. Zhang, "Investigation of electrorestrictive polymers for energy harvesting, " IEEE Trans. Ultrason., Ferroelectr., Freq. Contr., vol. 52, no. 12, pp. 2411-2417, 2005. (Pubitemid 43254202)
7. S. P. Beeby, R. N. Torah, M. J. Tudor, P. Glynne-Jones, T. O. O'Donnell, C. R. Sarah, and S. Roy, "A micro electromagnetic generator for vibration energy harvesting, " IOP J. Micromech. Microeng., vol. 17, pp. 1257-1265, Jun. 2007. (Pubitemid 47192945)
8. L. Wang and F. G. Yuan, "Vibration energy harvesting by magnetorestrictive material, " Smart Mater. Struct., vol. 17, pp. 1-14, Jun. 2008.
9. W. S. N. Trimmer and R. Jebens, "Actuators for microrobots, " in Proc. IEEE Int. Conf. Robotics Automation, May 1989, pp. 1547-1552.
10. P. D. Mitcheson, E. K. Reilly, T. Toh, P. K. Wright, and E. M. Yeatman, "Performance limits of the threeMEMS inertial energy generator transduction types, " J. Micromech. Microeng., vol. 17, pp. S211-S216, Aug. 2007.
11. R. Guillemet, P. Basset, D. Galayko, and T. Bourouina, "Combined optimization of electrical and mechanical parameters of an out-of-plane gap-closing electrostatic vibration energy harvester (veh), " in Proc. Symp. Design Test Integration and Packaging of MEMS/MOEMS (DTIP), May 2010, pp. 73-78.
12. P. Chapman and P. Krein, "Smaller is better? [micromotors and electric drives], " IEEE Ind. Appl. Mag., vol. 9, no. 1, pp. 62-67, Jan./Feb. 2003.
13. B. H. Stark, P. D. Mitcheson, P. Miao, T. C. Green, E. M. Yeatman, and A. S. Holmes, "Converter circuit design, semiconductor device selection and analysis of parasitics for micro-power electrostatic generators, " IEEE Trans. Power Electron., vol. 21, pp. 27-37, 2006.
14. T. Sterken, P. Fiorini, K. Baert, K. Puers, and G. Borghs, "An electretbased electrostatic-generator, " in Proc. 12th Int. Conf. Solid State Sensors, Actuators Microsyst. (Transducers), Boston, MA, Jun. 2003, pp. 1291-1294.
15. J. Boland, H. Chao-Yuan, Y. Suzuki, and Y. C. Tai, "Micro electret power generator, " in Proc. 16th IEEE Ann. Int. Conf. MEMS, Kyoto, Japan, Jan. 2003, pp. 538-541.
16. D. Miki, Y. Suzuki, and N. Kasagi, "Effect of nonlinear external circuit on electrostatic damping force of micro electret generator, " in Proc. IEEE Int. Conf. Solid-State Sensors, Actuators Microsyst., Jun. 2009, pp. 636-639.
17. B. Yen and J. Lang, "A variable-capacitance vibration-to-electric energy harvester, " IEEE Trans. Circuits Syst. I, Reg. Papers, vol. 53, no. 2, pp. 288-295, Feb. 2006. (Pubitemid 46395405)
18. P. D. Mitcheson, E. M. Yeatman, G. K. Rao, A. S. Holmes, and T. C. Green, "Energy harvesting for human and machine motion for wireless electronic devices, " Proc. IEEE, vol. 96, no. 9, pp. 1457-1486, Sep. 2008.
19. P. D. Mitcheson, T. C. Green, E. M. Yeatman, and A. S. Holmes, "Architectures for vibration-driven micropower generators, " IEEE/ASME J. Microelectromech. Syst., vol. 13, no. 3, pp. 429-440, Jun. 2004.
20. E. M. Yeatman, P. D. Mitcheson, and A. S. Holmes, "Micro-engineered devices for motion energy harvesting, " in Proc. IEEE Int. Electron Devices Meeting 2007, Dec. 2007, pp. 375-378.
21. S. Roundy, P. K. Wright, and K. S. Pister, "Micro-electrostatic vibration-to-electricity converters, " in Proc. 2002 ASME Int. Mech. Eng. Congr. Expo., New Orleans, LA, Nov. 2002, pp. 1-10.
22. E. Halvorsen, E. R. Westby, S. Husa, A. Vohl, N. P. Østbø, V. Leonov, T. Sterken, and T. Kvisterøy, "An electrostatic energy harvester with electret bias, " in Proc. Transducers 2009, Denver, CO, Jun. 2009, pp. 1381-1384.
23. B. Lee, S. Seok, and K. Chun, "A study on wafer level vacuum packaging for mems devices, " J. Micromech. Microeng., vol. 13, no. 5, pp. 663-663, 2003.
24. G. K. Rao, P. D. Mitcheson, and T. C. Green, "Mixed electromechanical simulation of electrostatic microgenerator using custom-semiconductor device models, " in Proc. PowerMEMS 2009, Washington DC, Dec. 2009, pp. 356-359.
25. R. Tashiro, N. Kabei, K. Katayama, Y. Ishizuka, F. Tsuboi, and K. Tsuchiya, "Development of an electrostatic generator that harnesses the motion of a living body, " JSME Int. J., ser. C, vol. 43, no. 4, pp. 916-922, 2000. (Pubitemid 33079805)
26. S. Meninger, J. O. Mur-Miranda, R. Amirtharajah, A. P. Chandrakasan, and J. H. Lang, "Vibration-to-Electric energy conversion, " IEEE Trans. Very Large Scale Integr. (VLSI) Syst., vol. 9, no. 1, pp. 64-76, Feb. 2001. (Pubitemid 32922812)
27. S. Meninger, J. O. Mur-Miranda, R. Amirtharajah, A. Chandrakasan, and J. Lang, "Vibration-to-Electric energy conversion, " in Proc. Int. Symp. Low Power Electron. Design 1999, Aug. 1999, pp. 48-53. (Pubitemid 30502832)
28. E. O. Torres andG. A. Rincon-Mora, "A0. 7-m BiCMOS electrostatic energy-harvesting system IC, " IEEE J. Solid State Circuits, vol. 45, no. 2, pp. 483-496, 2010.
29. G. J. Sheu, S. M. Yang, and T. Lee, "Development of a low frequency electrostatic comb-drive energy harvester compatible to SOC design by CMOS process, " Sens. Actuators A: Phys., vol. 167, no. 1, pp. 70-76, May 2011.
30. B. H. Stark and T. C. Green, "Comparison of SOI power device structures in power converters for high-voltage, low-charge electrostatic microgenerators, " IEEE Trans. Electron Devices, vol. 52, no. 7, pp. 1640-1648, Jul. 2005. (Pubitemid 41194403)
31. D. Grant and J. Gower, Power MOSFETS: Theory and Applications. London: Wiley, 1989.
32. K. Leaver, Microelectronic Devices, 2nd ed. London, U, K. : Imperial College Press, 1997.
33. J. Boggetto, Y. Lembeye, J. Ferrieux, and J. Keradec, "Copper losses in power integrated inductors on silicon, " in Proc. 37th IAS Ann. Meeting Conf. Rec. Industry Appl., 2002, vol. 2, pp. 977-983. (Pubitemid 35413536)
34. Press Release Vishay Inc., 2011 [Online]. Available: http://www. vishay. com/company/press/releases/2009/090909mosfets/
35. SFTW4N150 Data Sheet. Geneva, Switzerland: STMicroelectronics, 2009.
36. J. M. Torres and R. Dhariwal, "Electric field breakdown at micrometre seperations in air and vacuum, " Microsystem Technologies, vol. 6, no. 1, pp. 6-10, 1999. (Pubitemid 129556018)