On-chip synthesis of CuO nanowires for direct gas sensor integration

Proceedings of the IEEE Conference on Nanotechnology

Volumn , Issue , 2012, Pages

  Steinhauer, Stephan ^a   Brunet, Elise ^a   Maier, Thomas ^a   Mutinati, Giorgio C ^a   Kock, Anton ^a  

^a AIT AUSTRIAN INSTITUTE OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTOMETRIC GAS SENSORS; COPPER MICROSTRUCTURES; DIRECT INTEGRATION; FABRICATION PROCESS; FABRICATION TECHNOLOGIES; FULLY INTEGRATED; GAS SENSING DEVICES; ON CHIPS; SENSOR INTEGRATION; SMALL CONCENTRATION; THERMAL OXIDATION;

CHEMICAL DETECTION; CHEMICAL SENSORS; GAS DETECTORS; NANOWIRES;

NANOTECHNOLOGY;

EID: 84869161985     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2012.6321957     Document Type: Conference Paper

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