Feasibility of Top-Orthogonal-to-Bottom Electrode (TOBE) 2D CMUT arrays for low-channel-count 3D imaging

IEEE International Ultrasonics Symposium, IUS

Volumn , Issue , 2011, Pages 498-502

  Zemp, Roger J ^a   Zheng, Wei ^b   Zhang, Peiyu ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b NONE

Author keywords

2D arrays; 3D ultrasound imaging; CMUTs; MEMS

Indexed keywords

2D ARRAYS; 3D IMAGING; 3D ULTRASOUND IMAGING; CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCER; CHANNEL COUNT; CMUTS; FABRICATION TECHNOLOGIES; IMAGING SCHEMES; RELEASE PROCESS; TRANSMIT CHANNELS;

IMAGING SYSTEMS; MEMS; TRANSDUCERS; ULTRASONIC IMAGING;

ULTRASONIC TRANSDUCERS;

EID: 84869034657     PISSN: 19485719     EISSN: 19485727     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2011.0120     Document Type: Conference Paper

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