A high-sensitivity pressure sensor based on surface transverse wave

Sensors and Actuators, A: Physical

Volumn 187, Issue , 2012, Pages 141-146

  Kang, Along ^a   Lin, Jinqiu ^b   Ji, Xiaojun ^a   Wang, Weibiao ^c   Li, Hongyun ^a   Zhang, Chenrui ^a   Han, Tao ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b Troops 95862 of PLA ^*  (China)

^c Shoulder Electronics Limited   (China)

Author keywords

Equi intensity cantilever; Pressure sensor; Surface transverse wave

Indexed keywords

CONVENTIONAL ANALYTICAL; EQUI-INTENSITY CANTILEVER; FINITE ELEMENT METHOD FEM; FREQUENCY SHIFT; HIGH-SENSITIVITY PRESSURE; MATERIAL CONSTANT; OPTIMIZED SENSORS; PERTURBATION THEORY; PRESSURE LOADING; PRESSURE SENSITIVITIES; RAYLEIGH MODE; RELATIVE FREQUENCIES; ST-CUT QUARTZ; SURFACE TRANSVERSE WAVES;

FINITE ELEMENT METHOD; FREQUENCY SHIFT KEYING; LOADING; NANOCANTILEVERS; QUARTZ; SHEAR WAVES; WAVES;

PRESSURE SENSORS;

EID: 84868531545     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.08.017     Document Type: Article

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