Symmetry quantification and mapping using convergent beam electron diffraction

Ultramicroscopy

Volumn 124, Issue , 2013, Pages 71-76

  Kim, Kyou Hyun ^a   Zuo, Jian Min ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Convergent beam electron diffraction; Crystal Symmetry; Scanning electron diffraction; Symmetry mapping

Indexed keywords

CONVERGENT BEAM ELECTRON DIFFRACTION (CBED); DIGITAL MICROGRAPHS; ELSEVIER; MIRROR SYMMETRY; NORMALIZED CROSS-CORRELATION; ROBUST MEASUREMENT; SCANNING ELECTRONS;

ALGORITHMS; CRYSTAL SYMMETRY; DEFECTS; SILICON; SILICON WAFERS;

MAPPING;

SILICON;

ALGORITHM; ANALYTIC METHOD; ARTICLE; AUTOMATION; CALIBRATION; CONVERGENT BEAM ELECTRON DIFFRACTION; CORRELATION COEFFICIENT; CRYSTAL STRUCTURE; ELECTRON DIFFRACTION; QUANTITATIVE ANALYSIS; SENSITIVITY ANALYSIS; SYMMETRY MAPPING; SYMMETRY QUANTIFICATION; CLASSIFICATION ALGORITHM; COMPUTER SIMULATION; CRYSTAL; IMAGE ANALYSIS; IMAGE PROCESSING; MATHEMATICAL ANALYSIS; MATHEMATICAL MODEL; PROCESS DEVELOPMENT; COMPUTER ASSISTED TOMOGRAPHY; CRYSTALLOGRAPHY; ELECTRON; METHODOLOGY;

ALGORITHMS; CRYSTALLOGRAPHY; ELECTRONS; TOMOGRAPHY, X-RAY COMPUTED;

EID: 84868515680     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2012.09.002     Document Type: Article

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