Active aberration- and point-spread-function control in direct laser writing

Optics Express

Volumn 20, Issue 22, 2012, Pages 24949-24956

  Waller, Erik H ^a   Renner, Michael ^a   Von Freymann, Georg ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATION CORRECTION; AMPLITUDE FILTERS; DIRECT LASER WRITING; HIGH NUMERICAL APERTURE OBJECTIVE; NUMERICAL CALCULATION; OPTICAL PERFORMANCE; OPTICAL QUALITIES; PROXIMITY EFFECTS; SPATIAL LIGHT MODULATORS; THREE-DIMENSIONAL RESOLUTION;

ASPECT RATIO; LIGHT MODULATORS; PHOTONIC CRYSTALS;

THREE DIMENSIONAL;

EID: 84868224036     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.024949     Document Type: Article

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