Purification of metallurgical grade silicon by a microwave-assisted plasma process

Separation and Purification Technology

Volumn 102, Issue , 2013, Pages 82-85

  Wang, Jiangtao ^a   Li, Xiaodong ^a   He, Yongmin ^a   Feng, Na ^a   An, Xiuyun ^a   Teng, Feng ^a   Gao, Caitian ^a   Zhao, Changhui ^a   Zhang, Zhenxing ^a   Xie, Erqing ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

Impurity concentrations; Metallurgical grade silicon; Microwave; Plasma; Purification

Indexed keywords

ICP-AES; IMPURITIES IN; IMPURITY ATOMS; IMPURITY CONCENTRATION; INDUCTIVELY COUPLED PLASMA-ATOMIC EMISSION SPECTROMETRY; METALLURGICAL GRADE SILICONS (MGSI); MICROWAVE PLASMA; MICROWAVE-ASSISTED; PHOTORESPONSES; PLASMA PROCESS; REMOVAL RATE; SI WAFER; SWITCHING BEHAVIORS; ULTRA-HIGH; UNDERLYING MECHANISM;

ATOMIC EMISSION SPECTROSCOPY; IMPURITIES; INDUCTIVELY COUPLED PLASMA; METALLURGY; MICROWAVES; PHOSPHORUS; PLASMA APPLICATIONS; PLASMAS; PURIFICATION; SILICON;

SILICON WAFERS;

EID: 84867803733     PISSN: 13835866     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.seppur.2012.09.035     Document Type: Article

References (20)

1. A. Bentzen, and A. Holt Overview of phosphorus diffusion and gettering in multicrystalline silicon Mater. Sci. Eng. B 159-160 2009 228 234
2. J. Zhang, T.J. Li, X.D. Ma, D.W. Luo, D.H. Liu, N. Liu, and Y.B. Zhang Purifying multicrystalline silicon by directional solidification method with induced electromagnetic field Mater. Sci. Technol. 27 2011 440 445
3. C.P. Khattak, D.B. Joyce, and F. Schmid A simple process to remove boron from metallurgical grade silicon Sol. Energy Mater. Sol. Cells 74 2002 77 89
4. S. Rousseau, M. Benmansour, D. Morvan, and J. Amouroux Purification of MG silicon by thermal plasma process coupled to DC bias of the liquid bath Sol. Energy Mater. Sol. Cells 91 2007 1906 1915
5. E.J. Jung, B.M. Moon, and D.J. Min Quantitative evaluation for effective removal of phosphorus for SoG-Si Sol. Energy Mater. Sol. Cells 95 2011 1779 1784
6. W. Lee, J. Kim, B.-y. Jang, Y. Ahn, H. Lee, and W. Yoon Metal impurities behaviors of silicon in the fractional melting process Sol. Energy Mater. Sol. Cells 95 2011 59 62
7. G. Flamant, V. Kurtcuoglu, J. Murray, and A. Steinfeld Purification of metallurgical grade silicon by a solar process Sol. Energy Mater. Sol. Cells 90 2006 2099 2106
8. W. Lee, W. Yoon, and C. Park Purification of metallurgical-grade silicon in fractional melting process J. Cryst. Growth 312 2009 146 148
9. C.Z. Zhang, S. Liu, Y.S. Wang, and Y.G. Chen Performance improvements of solar-grade crystalline silicon by continuously variable temperature phosphorous gettering process using a porous silicon layer Mater. Sci. Semicond. Process. 13 2010 209 213
10. J. Chung, J. Kim, B. Jang, Y. Ahn, H. Lee, and W. Yoon Effect of retrograde solubility on the purification of MG Si during fractional melting Sol. Energy Mater. Sol. Cells 95 2011 45 48
11. J.J. Wu, W.H. Ma, B. Yang, Y.N. Dai, and K. Morita Boron removal from metallurgical grade silicon by oxidizing refining Trans. Nonferr. Metal. Soc. 19 2009 463 467
12. X. Peng, W. Dong, Y. Tan, and D. Jiang Removal of aluminum from metallurgical grade silicon using electron beam melting Vacuum 86 2011 471 475
13. X. Gu, X. Yu, and D. Yang Low-cost solar grade silicon purification process with Al-Si system using a powder metallurgy technique Sep. Purif. Technol. 77 2011 33 39
14. B.P. Lee, H.M. Lee, D.H. Park, J.S. Shin, T.U. Yu, and B.M. Moon Refining of MG-Si by hybrid melting using steam plasma and EMC Sol. Energy Mater. Sol. Cells 95 2011 56 58
15. Y. Delannoy, C. Alemany, K.I. Li, P. Proulx, and C. Trassy Plasma-refining process to provide solar-grade silicon Sol. Energy Mater. Sol. Cells 72 2002 69 75
16. C. Alemany, C. Trassy, B. Pateyron, K.I. Li, and Y. Delannoy Refining of metallurgical-grade silicon by inductive plasma Sol. Energy Mater. Sol. Cells 72 2002 41 48
17. M. Benmansour, M. Nikravech, D. Morvan, J. Amouroux, and J. Chapelle Diagnostic by emission spectroscopy of an argon-hydrogen RF inductive thermal plasma for purification of metallurgical grade silicon J. Phys. D: Appl. Phys. 37 2004 2966 2974
18. K. Morita, and T. Miki Thermodynamics of solar-grade-silicon refining Intermetallics 11 2003 1111 1117
19. J.C.S. Pires, A.F.B. Braga, and P.R. Mei Profile of impurities in polycrystalline silicon samples purified in an electron beam melting furnace Sol. Energy Mater. Sol. Cells 79 2003 347 355
20. K. Suzuki, T. Kumagai, and N. Sano Removal of boron from metallurgical-grade silicon by applying the plasma treatment ISIJ Int. 32 1992 630 634