Titanium nitride thin film as an adhesion layer for surface plasmon resonance sensor chips

Applied Surface Science

Volumn 261, Issue , 2012, Pages 749-752

  Kim, W M ^a   Kim, S H ^b   Lee, K S ^a   Lee, T S ^a   Kim, I H ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

Adhesion; SPR sensor; Surface plasmon resonance; Titanium nitride thin film; Titanium thin film

Indexed keywords

ADHESION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PLASMONICS; PLASMONS; THIN FILMS; TITANIUM NITRIDE;

ELECTRICAL CONDUCTIVITY; LONG-WAVELENGTH-RANGE; RADIO FREQUENCY MAGNETRON SPUTTERING; RESPONSE CHARACTERISTIC; SPR SENSORS; SURFACE PLASMON RESONANCE SENSOR; TITANIUM NITRIDE THIN FILMS; TITANIUM THIN FILMS;

SURFACE PLASMON RESONANCE;

EID: 84867745317     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.08.093     Document Type: Article

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