Toward a miniaturized low-power micromechanical electronic nose

IEEE Sensors Journal

Volumn 12, Issue 11, 2012, Pages 3184-3188

  Karabacak, Devrez M ^a   Sieben Xu, Ling ^a   Vandecasteele, Marianne ^a   Van Andel, Yvonne ^a   Wouters, Daan ^a   Calama, Mercedes Crego ^a   Brongersma, Sywert H ^a  

^a HOLST CENTRE   (Netherlands)

Author keywords

Electronic nose; microelectromechanical systems (MEMS); volatile detection

Indexed keywords

AXIAL STRESS; DOUBLY CLAMPED BEAM; ELECTRONIC NOSE; FUNCTIONALIZED; HIGH ASPECT RATIO; LOW MOLECULAR WEIGHT; LOW POWER; MICRO-MECHANICAL; POLYMER COATING; RESONANCE FREQUENCIES; RESONANT TRANSDUCERS; SELECTIVE DETECTION; VOLATILE COMPOUNDS;

ASPECT RATIO; ELECTROMECHANICAL DEVICES; MEMS; NATURAL FREQUENCIES; POLYMERS; RESONATORS; TRANSDUCERS; VOLATILE ORGANIC COMPOUNDS;

PLASTIC COATINGS;

EID: 84867705821     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2012.2193566     Document Type: Article

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