Self-Aligned silicon fins in metallic slits as a platform for planar wavelength-selective nanoscale resonant photodetectors

Optics Express

Volumn 20, Issue 20, 2012, Pages 22735-22742

  Balram, Krishna C ^a   Miller, David A B ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINS (HEAT EXCHANGE); FORCED CONVECTION; NANOTECHNOLOGY; OPTICAL INTERCONNECTS; PHOTODETECTORS; PHOTONS; WAVELENGTH;

ABSORPTION LENGTH; CENTER WAVELENGTH; FIN WIDTHS; METALLIC SLITS; MULTIPLE DETECTORS; MULTISPECTRAL IMAGING SENSORS; NANO SCALE; PHOTODETECTOR STRUCTURE; SELF-ALIGNED; SILICON FINS; SINGLE-STEP PROCESS; SPECTRAL RESPONSE;

SILICON DETECTORS;

METAL NANOPARTICLE; SILICON;

ARTICLE; CHEMISTRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; INSTRUMENTATION; LIGHT; NANOTECHNOLOGY; PHOTOMETRY; RADIATION EXPOSURE; SEMICONDUCTOR; SURFACE PLASMON RESONANCE;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LIGHT; METAL NANOPARTICLES; NANOTECHNOLOGY; PHOTOMETRY; SEMICONDUCTORS; SILICON; SURFACE PLASMON RESONANCE;

EID: 84866679300     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.022735     Document Type: Article

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