Resonant characteristics of rectangular microcantilevers vibrating torsionally in viscous liquid media

2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings

Volumn , Issue , 2012, Pages 807-812

  Cai, Tao ^a   Josse, Fabien ^a   Heinrich, Stephen ^a   Nigro, Nicholas ^a   Dufour, Isabelle ^b   Brand, Oliver ^c  

^a Marquette University   (United States)

^b UNIVERSITÉ DE BORDEAUX   (France)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL EXPRESSIONS; BEAM GEOMETRY; CHEMICAL SENSING APPLICATIONS; FINITE ELEMENT MODELS; FLEXURAL VIBRATIONS; HYDRODYNAMIC FUNCTIONS; HYDRODYNAMIC LOADS; LIQUID PHASE; LOWER LIMITS OF DETECTIONS; MASS SENSITIVITY; MICRO-CANTILEVERS; NUMERICAL RESULTS; OUT-OF-PLANE; PER UNIT LENGTH; POLAR MOMENT; QUALITY FACTORS; REDUCED FREQUENCY; RESONANCE FREQUENCIES; RESONANT CHARACTERISTICS; RESONANT MODE; ROTATIONAL INERTIA; TORSIONAL CONSTANT; TORSIONAL MODES; TORSIONAL STIFFNESS; VIBRATING BEAM; VISCOUS LIQUIDS;

ASPECT RATIO; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; FINITE ELEMENT METHOD; HYDRODYNAMICS; NATURAL FREQUENCIES; REYNOLDS NUMBER;

LIQUIDS;

EID: 84866636408     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FCS.2012.6243700     Document Type: Conference Paper

References (12)

1. J. E. Sader, "Frequency response of cantilever beams immersed in viscous fluids with applications to te atomic force microscope". Journal of Applied Physics, 84(1), pp. 64-76, 1998.
2. L. Beardslee, A.M. Addous, S.M. Heinrich, F. Josse, I. Dufour, and O. Brand, "Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications", Journal of Microelectromechanical Systems, 19(4), pp. 1015-1017, 2010.
3. R. Cox, F. Josse, S. Heinrich, I. Dufour, O. Brand, "Resonant microcantilevers vibrating laterally in viscous liquid media", IEEE International Frequency Control Symposium (IFCS), pp. 85-90, June 2010.
4. R. Cox, F. Josse, S. M. Heinrich, O. Brand, I. Dufour, "Characteristics of laterally vibrating resonant microcantilevers in viscous liquid media", Journal of Applied Physics, 111, 014907, 2012.
5. C. P. Green and J. E. Sader, "Torsional frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope", Journal of Applied Physics, 92, 10, 6262, 2002.
6. L. D. Landau and E. M. Lifshitz, Theory of Elasticity, Pergamon, London, 1959.
7. R. J. Roark, Formulas for Stress and Strain, McGraw-Hill, New York, 1943.
8. W.-H. Chu, Technical Report No. 2, DTMB, Contract Nobs-86396(X), Southwest Research Institute, San Antonio, Texas, 1963.
9. G. K. Batchelor, Introduction to Fluid Dynamics, New York: Cambridge University Press, 1977.
10. G. G. Stokes, "On the Effect of the Rotations of the Cylinders or Spheres round their own Axes in increasing the Logarithmic Decrement of the Arc of Vibration", Math. Phys. Pap. 5, 207, 1886.
11. E.O Tuck, "Calculation of Unsteady Flows Due to small motions of cylinders in a viscous fluid", Journal of Engineering Mathematics, 3, 1, January 1969.
12. Sokolnikoff, Mathematical Theory of Elasticity, 2nd ed., pp. 128.