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Materials Letters

Volumn 87, Issue , 2012, Pages 124-126

Highly ordered and well aligned TiN nanotube arrays fabricated via template-assisted atomic layer deposition

(3) Yoon, Jaesung a Kim, Sangjoon a No, Kwangsoo a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

Author keywords

ALD; Anodic aluminum oxide; Nanotube arrays; TiN

Indexed keywords

AIR DRYING; ALD; ANODIC ALUMINUM OXIDE; ANODIC ALUMINUM OXIDE TEMPLATE; LATERAL CAPILLARY FORCES; LOW ASPECT RATIO; NANOTUBE ARRAYS; WELL-ALIGNED;

ANODIC OXIDATION; ASPECT RATIO; ATOMIC LAYER DEPOSITION; OXIDES; TIN; TITANIUM NITRIDE;

NANOTUBES;

EID: 84865838052 PISSN: 0167577X EISSN: None Source Type: Journal
DOI: 10.1016/j.matlet.2012.07.081 Document Type: Article

Times cited : (13)

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