A combined ElectroWetting on Dielectrics superhydrophobic platform based on silicon micro-structured pillars

Microelectronic Engineering

Volumn 98, Issue , 2012, Pages 651-654

  Accardo, Angelo ^a,b   Gentile, Francesco ^a,b   Coluccio, Maria Laura ^a,b   Mecarini, Federico ^a   De Angelis, Francesco ^a   Di Fabrizio, Enzo ^a,b  

^a ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

^b UNIVERSITY MAGNA GRAECIA OF CATANZARO   (Italy)

Author keywords

EWOD; Micromanipulator; Micropillars; Silicon; Superhydrophobicity

Indexed keywords

BIOMEDICAL FIELDS; DC VOLTAGE; ELECTROWETTING ON DIELECTRICS; EWOD; MICRO-PILLARS; REACTIVE ION ETCH; SUPER-HYDROPHOBIC SURFACES; SUPERHYDROPHOBIC; SUPERHYDROPHOBICITY;

CONTACT ANGLE; HYDROPHOBICITY; MICROMANIPULATORS; PHOTOLITHOGRAPHY; SILICON; WETTING;

DIELECTRIC DEVICES;

EID: 84865589246     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.07.028     Document Type: Conference Paper

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