Micromachining of a Bimorph Pb(Zr,Ti)O 3 (PZT) cantilever using a micro-electromechanical systems (MEMS) process for energy harvesting application

Journal of Nanoscience and Nanotechnology

Volumn 12, Issue 7, 2012, Pages 6011-6015

  Kim, Moonkeun ^a   Hwang, Beomseok ^a   Jeong, Jaehwa ^a   Min, Nam Ki ^a   Kwon, Kwang Ho ^a  

^a Korea University   (South Korea)

Author keywords

Bimorph Cantilever; Energy Harvesting; Micromachining; PZT

Indexed keywords

BIMORPH CANTILEVER; BOTTOM ELECTRODES; CANTILEVER VIBRATIONS; PB(ZR , TI)O; PIEZOELECTRIC CONVERSION; PROOF MASS; PZT; UNIMORPH;

COMPOSITE MICROMECHANICS; ELECTRODES; ENERGY HARVESTING; FABRICATION; LEAD; MEMS; MICROMACHINING; NATURAL FREQUENCIES; SILICON; ZIRCONIUM;

NANOCANTILEVERS;

EID: 84865142659     PISSN: 15334880     EISSN: 15334899     Source Type: Journal    
DOI: 10.1166/jnn.2012.6365     Document Type: Article

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