Sensing viscosity and density of glycerol-water mixtures utilizing a suspended plate MEMS resonator

Microsystem Technologies

Volumn 18, Issue 7-8, 2012, Pages 1045-1056

  Cerimovic, Samir ^a   Beigelbeck, Roman ^b   Antlinger, Hannes ^c   Schalko, Johannes ^a,b   Jakoby, Bernhard ^c   Keplinger, Franz ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE   (Austria)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE LAYER; GLYCEROL-WATER MIXTURES; MASS DENSITIES; MEMS RESONATORS; ONLINE MONITORING; PIEZORESISTIVE READ-OUT; PIEZORESISTOR; PLATE VIBRATION; RESONANT SYSTEMS; SENSING ELEMENTS; SINUSOIDAL EXCITATIONS; VIBRATING PLATE;

FREQUENCY RESPONSE; GLYCEROL; LORENTZ FORCE; PLATES (STRUCTURAL COMPONENTS);

MICROELECTROMECHANICAL DEVICES;

EID: 84864627768     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-012-1437-9     Document Type: Conference Paper

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