MZI optical isolator with Si-wire waveguides by surface-activated direct bonding

Optics Express

Volumn 20, Issue 16, 2012, Pages 18440-18448

  Shoji, Yuya ^a   Ito, Masatoshi ^a   Shirato, Yuya ^a   Mizumoto, Tetsuya ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMA APPLICATIONS; WAVEGUIDE ISOLATORS;

DIRECT BONDING; MACH-ZEHNDER; NITROGEN PLASMA TREATMENT; OPTICAL ISOLATION; OPTICAL ISOLATORS; OXYGEN PLASMA TREATMENTS; SI WIRE WAVEGUIDE;

SILICON;

EID: 84864579537     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.018440     Document Type: Article

References (16)

1. K. Ando, T. Okoshi, and N. Koshizuka, "Waveguide magneto-optical isolator fabricated by laser annealing", Appl. Phys. Lett. 53(1), 4-6 (1988).
2. T. Shintaku, "Integrated optical isolator based on efficient nonreciprocal radiation monde conversion", Appl. Phys. Lett. 73(14), 1946-1948 (1998). (Pubitemid 128672032)
3. J. Fujita, M. Levy, R. M. Osgood, Jr., L. Wilkens, and H. Dötsch, "Waveguide optical isolator based on Mach-Zehnder interferometer", Appl. Phys. Lett. 76(16), 2158-2160 (2000).
4. Y. Shoji and T. Mizumoto, "Wideband operation of Mach-Zehnder interferomertic magneto-optical isolator using phase adjustment", Opt. Express 15(20), 13446-13450 (2007). (Pubitemid 47538453)
5. H. Shimizu and Y. Nakano, "Fabrication and characterization of an InGaAsP/InP active waveguide optical isolator with 14.7 dB/mm TE mode nonreciprocal attenuation", J. Lightwave Technol. 24(1), 38-43 (2006). (Pubitemid 46489105)
6. W. V. Parys, B. Moeyrsoon, D. V. Thourhout, R. Baets, M. Vanwolleghem, B. Dagens, J. Decobert, O. L. Gouezigou, D. Make, R. Vanheertum, and L. Large, "Transverse magnetic mode nonreciprocal propagation in an amplifying AlGaInAs/InP optical waveguide isolator", Appl. Phys. Lett. 88(7), 071115 (2006).
7. L. Bi, J. Hu, P. Jiang, D. H. Kim, G. F. Dionne, L. C. Kimerling, and C. A. Ross, "On-chip optical isolation in monolithically integrated non-reciprocal optical resonators", Nat. Photonics 5(12), 758-762 (2011).
8. S. Ghosh, S. Keyvavinia, W. Van Roy, T. Mizumoto, G. Roelkens, and R. Baets, "Ce: YIG/Silicon-on-Insulator waveguide optical isolator realized by adhesive bonding", Opt. Express 20(2), 1839-1848 (2012).
9. M.-C. Tien, T. Mizumoto, P. Pintus, H. Kromer, and J. E. Bowers, "Silicon ring isolators with bonded nonreciprocal magneto-optic garnets", Opt. Express 19(12), 11740-11745 (2011).
10. Y. Shoji, T. Mizumoto, H. Yokoi, I.-W. Hsieh, and R. M. Osgood, Jr., "Magneto-optical isolator with silicon waveguides fabricated by direct bonding", Appl. Phys. Lett. 92(7), 071117 (2008).
11. R. Chen, G. Jiang, Y. Hao, J. Yang, M. Wang, and X. Jiang, "Enhancement of nonreciprocal phase shift by using nanoscale air gap", Opt. Lett. 35(9), 1335-1337 (2010).
12. T. Mizumoto and Y. Naito, "Nonreciprocal propagation characteristics of YIG thin film", IEEE Trans. Microw. Theory Tech. 30(6), 922-925 (1982). (Pubitemid 12532599)
13. Y. Okamura, H. Inuzuka, T. Kikuchi, and S. Yamamoto, "Nonreciprocal propagation in magnetooptic YIG rib waveguides", J. Lightwave Technol. 4(7), 711-714 (1986).
14. R. Takei, K. Yoshida, and T. Mizumoto, "Effects of wafer precleaning and plasma irradiation to wafer surfaces on plasma-assisted surface-activated direct bonding", Jpn. J. Appl. Phys. 49(8), 086204 (2010).
15. T. Shintaku and T. Uno, "Preparation of Ce-substituted Yttrium iron garnet films for magneto-optic waveguide devices", Jpn. J. Appl. Phys. 35(Part 1, No. 9 A 9A), 4689-4691 (1996).
16. A. W. Fang, H. Park, O. Cohen, R. Jones, M. J. Paniccia, and J. E. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser", Opt. Express 14(20), 9203-9210 (2006). (Pubitemid 44507184)