Energy loss of electrons backscattered from solids: Measured and calculated spectra for Al and Si

Surface and Interface Analysis

Volumn 44, Issue 8, 2012, Pages 1110-1113

  Dapor, Maurizio ^a,c   Calliari, Lucia ^a   Fanchenko, Sergey ^b  

^a Centre for Materials and Microsystems   (Italy)

^b KURCHATOV INSTITUTE   (Russian Federation)

^c UNIVERSITY OF TRENTO   (Italy)

Author keywords

electron energy loss spectroscopy; electron solid interaction; impact phenomena

Indexed keywords

BACK-SCATTERED; DIELECTRIC FORMALISM; ELASTIC-SCATTERING EVENTS; ELECTRON ENERGY LOSS; ELECTRON-SOLID INTERACTION; EXPERIMENTAL SPECTRA; IMPACT PHENOMENA; PRIMARY ELECTRONS; TRAJECTORY MODELING;

DISSOCIATION; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; SILICON;

ELASTIC SCATTERING;

EID: 84864425811     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.4835     Document Type: Conference Paper

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