Deposition of Ga2O3 thin film for high-temperature oxygen sensing applications

Journal of Ovonic Research

Volumn 8, Issue 3, 2012, Pages 73-79

  Ju, Long Tsong ^a   Ju, Shr Liang ^b  

^a FAR EAST UNIVERSITY   (Taiwan)

^b NATIONAL PINGTUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

AFM; Gallium oxide; Sputtering; Wheatstone Bridge Circuit

Indexed keywords

EID: 84864090031     PISSN: 18422403     EISSN: 15849953     Source Type: Journal    
DOI: None     Document Type: Article

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