Maskless patterning by pulsed-power plasma printing

IEEE Transactions on Plasma Science

Volumn 40, Issue 7 PART 2, 2012, Pages 1913-1925

  Huiskamp, T ^a   Brok, W J M ^b   Stevens, A A E ^b   Van Heesch, E J M ^a   Pemen, A J M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b InnoPhysics BV   (Netherlands)

Author keywords

Dielectric barrier discharge (DBD) plasma; Printed electronics; Pulsed power supply

Indexed keywords

ALTERNATING CURRENT; APPLIED VOLTAGES; DIELECTRIC BARRIER DISCHARGE PLASMAS; FABRICATION PROCESS; GAP DISTANCES; HIGH VOLTAGE PULSE; HIGH-SPEED; MASK LESS; MASKLESS PATTERNING; OPTIMAL PARAMETER; PLASMA ENERGY; PLASMA EXPERIMENTS; PLASMA MODEL; PRINT HEAD; PRINT SPEED; PRINTED ELECTRONICS; PULSE SOURCES; PULSED-POWER; PULSED-POWER PLASMAS; PULSED-POWER SUPPLIES;

ELECTRIC POTENTIAL; ELECTRIC POWER SYSTEMS; EXPERIMENTS; PRINTING; PRINTING PRESSES;

PLASMAS;

EID: 84863718628     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2012.2195510     Document Type: Article

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