Alignment and use of self-assembled peptide nanotubes as dry-etching mask

Japanese Journal of Applied Physics

Volumn 51, Issue 6 PART 2, 2012, Pages

  Andersen, Karsten B ^a   Castillo León, Jaime ^a   Bakmand, Tanya ^a   Svendsen, Winnie E ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

DRY CONDITION; ETCHING MASKS; NANOSLITS; PEPTIDE NANOTUBES; SELF-ASSEMBLED; SELF-ASSEMBLED PEPTIDES; SILICON NANOWIRE DEVICE;

NANOTECHNOLOGY; NANOWIRES; ORGANIC SOLVENTS; PEPTIDES;

NANOTUBES;

EID: 84863309923     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.51.06FF13     Document Type: Article

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