Development of a high-sensitivity strain measurement system based on a SH SAW sensor

Journal of Micromechanics and Microengineering

Volumn 22, Issue 2, 2012, Pages

  Oh, Haekwan ^a   Lee, Keekeun ^a   Eun, Kyoungtae ^b   Choa, Sung Hoon ^b   Yang, Sang Sik ^a  

^a Ajou University   (South Korea)

^b Seoul National University of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSION FORCE; COUPLING OF MODES; DOGBONE; EXTERNAL STRAINS; FREQUENCY DIFFERENCES; HIGH-SENSITIVITY; INTERDIGITAL TRANSDUCER; OPTIMAL DEVICES; PIEZOELECTRIC SUBSTRATES; PROPAGATION VELOCITIES; SAW DELAY LINE; SH WAVE; SH-SAW SENSORS; SHEAR HORIZONTAL SURFACE ACOUSTIC WAVE; SPLIT ELECTRODE; STRAIN SENSORS; STRETCHING FORCE; SUBSTRATE DENSITY;

ACOUSTIC SURFACE WAVE DEVICES; MEASUREMENTS; MICROSENSORS; SHEAR WAVES; STRAIN ENERGY; STRAIN GAGES; STRAIN MEASUREMENT; ULTRASONIC TRANSDUCERS; WAVES;

PRINTED CIRCUIT BOARDS;

EID: 84863238151     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/2/025002     Document Type: Article

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