Life cycle assessment of silicon wafer processingfor microelectronic chips and solar cells

International Journal of Life Cycle Assessment

Volumn 17, Issue 2, 2012, Pages 126-144

  Schmidt, Mario ^a   Hottenroth, Heidi ^a   Schottler, Martin ^b   Fetzer, Gabriele ^c   Schlüter, Birgit ^c  

^a PFORZHEIM UNIVERSITY   (Germany)

^b Verfahrenstechnische Beratung   (Germany)

^c M+W Germany GmbH   (Germany)

Author keywords

Crystalline silicon; DRAM; Ecoinvent; Fabrication; Impact 2002+; Life cycle assessment; Logic chip; Memory chip; Microelectronic; Photovoltaic; Semiconductor; Solar cell; Wafer

Indexed keywords

ALUMINUM; CADMIUM; HEAVY METAL; LEAD; SILICON; SILICON WAFER; SILVER; TIN; UNCLASSIFIED DRUG;

AIR POLLUTION; ARTICLE; CARBON FOOTPRINT; CONTROLLED STUDY; ENERGY CONSUMPTION; ENVIRONMENTAL IMPACT ASSESSMENT; LIFE CYCLE ASSESSMENT; MATERIAL STATE; PRIORITY JOURNAL; SEMICONDUCTOR; WASTE MANAGEMENT; WASTE WATER MANAGEMENT;

EID: 84863096278     PISSN: 09483349     EISSN: 16147502     Source Type: Journal    
DOI: 10.1007/s11367-011-0351-1     Document Type: Article

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