Preparation and properties of Ti/TiN/SiC functionally gradient films on austenitic stainless steel

Cailiao Rechuli Xuebao/Transactions of Materials and Heat Treatment

Volumn 33, Issue 1, 2012, Pages 150-154

  Li, He Qin ^a   Du, Zhi ^a   Chu, Han Qi ^a   Nie, Zhu Hua ^a  

^a HEFEI UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Austenitic stainless steel; Magnetron sputtering; SiC monolayer films; Ti TiN bilayer films; Ti TiN SiC functionally gradient films

Indexed keywords

AFM; BI-LAYER; BI-LAYER FILMS; CRYSTALLINITIES; FUNCTIONALLY GRADIENT; MAGNETRON SPUTTERING METHOD; MAXIMUM VALUES; MICROHARDNESS TESTS; MONOLAYER FILM; PREPARATION AND PROPERTIES; SIC FILMS; SIC MONOLAYER FILMS; XRD;

AUSTENITIC STAINLESS STEEL; MAGNETIC FILMS; MAGNETRON SPUTTERING; MICROHARDNESS; SILICON CARBIDE;

FILM PREPARATION;

EID: 84863060392     PISSN: 10096264     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

1. SHAO Hong-hong, ZHANG Ye, GAO Jian-chang, et al. Binding force of SiC films prepared by magnetron sputtering on carbon steel[J]. Heat Treatment of Metals, 2007, 32(2):50-53.
2. 2001.
3. Jonsson B, Hogmark S. Hardness measurements of thin films[J]. Thin Films, 1984, 114(3):257-269.
4. Chechenin N G, Bottiger J, Krog J P. Nanoindentation of amorphous aluminum oxide films I: The influence of the substrate on the plastic properties [J]. Thin Solid Films, 1995, 261(1-2):219-227.
5. Pelleg J, Zevin L Z, Lungo S, et al. Reactive-sputter-deposited TiN films on glass substrates[J]. Thin Solid Films, 1991, 197(1-2):117-128.
6. Jones M I, Mccoll I R, Grant D M. Effect of substrate preparation and deposition conditions on the preferred orientation of TiN coatings deposited by RF reactive sputtering[J]. Surface and Coatings Technology, 2000, 132(2-3):143-151.
7. WANG Qing-xi, MI Qian, HUI Ying-xue. Influence of nitrogen flux on structure and mechanical properties of TiN films deposited with UBMS technique[J]. Materials Review, 2008, 22:66-68.
8. Li G Y, Lao J J, Tian J W, et al. Coherent growth and mechanical properties of AlN/VN multilayers[J]. Journal of Applied Physics, 2004, 95(1):92-96.
9. Kim C, Qadri S B, Scanlon M R, et al. Low-dimension structural properties and microindentation studies of ion-beam-sputtered multilayers of Ag/Al films[J]. Thin Solid Films, 1994, 240(1-2):52-55.
10. LAO Ji-jun, KONG Ming, ZHANG Hui-juan, et al. Growth structure and mechanical properties of TiN/SiC nano-multilayers[J]. Acta Physica Sinica, 2004, 53(6):1962-1966.
11. Li D, Lin X W, Cheng S C. Structure and hardness studies of CNx/TiN nanocomposite coatings[J]. Applied Physics Letters, 1996, 68(9):1211-1213.
12. LI Ge-yang, LAO Ji-jun, TIAN Jia-wang, et al. Coherent growth and superhardness effect of AlN/VN nanomultilayers[J]. Chinese Journal of Mechanical Engineering, 2004, 40(12):56-59.