Single-grain Si TFTs using spin-coated liquid-silicon

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2011, Pages

  Zhang, Jin ^a   Ishihara, Ryoichi ^a   Tagagishi, Hideyuki ^b   Kawajiri, Ryo ^b   Shimoda, Tatsuya ^b,c   Beenakker, C I M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS AND HOLES; GRAIN DIAMETER; LASER CRYSTALLIZATION; LIQUID SILICON; ORGANIC MATERIALS;

ELECTRON DEVICES; LIQUIDS;

SILICON;

EID: 84863054602     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2011.6131553     Document Type: Conference Paper

References (3)

1. G. Gelink, et al., Nature Mater., 3 (2004) 106
2. T. Shimoda, et al., Nature, 440 (2006) 783
3. R. Ishihara, et al., Thin Solid Film, vol. 427 (2003) 77-85