Nanocomposite TiC/a-C:H film prepared on titanium aluminium alloy substrates by PSII assistant MW-ECRCVD

Chinese Physics

Volumn 16, Issue 4, 2007, Pages 1105-1110

  Ma, Guo Jia ^a   Liu, Xi Liang ^b   Zhang, Hua Fang ^a   Wu, Hong Chen ^a   Peng, Li Ping ^a  

^a AVIC Manufacturing Technology Institute   (China)

^b HARBIN ENGINEERING UNIVERSITY   (China)

Author keywords

Diamond like carbon film; Nanocomposite; PSII; TiC a C:H

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND LIKE CARBON FILMS; MICROSTRUCTURE; NANOCOMPOSITES; TITANIUM ALLOYS; TITANIUM CARBIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS HYDROGENATED CARBON; NANOMETRE GRAINS;

THIN FILMS;

EID: 34250216411     PISSN: 10091963     EISSN: 17414199     Source Type: Journal    
DOI: 10.1088/1009-1963/16/4/041     Document Type: Article

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