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Volumn 8202, Issue , 2011, Pages

Ultra-precision turning of complex spiral optical delay line

Author keywords

optical delay line; single point diamond turning; spiral mirror; Ultra precision

Indexed keywords

AIR BEARING; COORDINATES UNIFICATION; EFFICIENCY IMPROVEMENT; FORM ERRORS; HIGH REPETITION RATE; HIGH-SPEED; LASER INTERFEROMETER; MATHEMATIC MODEL; MEASURING METHOD; NANOMETRICS; OPTICAL DELAY; OPTICAL DELAY LINES; POSITION SENSORS; SCANNING RESOLUTION; SINGLE POINT DIAMOND TURNING; ULTRA PRECISION;

EID: 84862911034     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.911858     Document Type: Conference Paper
Times cited : (2)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.