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Volumn 8202, Issue , 2011, Pages
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Ultra-precision turning of complex spiral optical delay line
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Author keywords
optical delay line; single point diamond turning; spiral mirror; Ultra precision
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Indexed keywords
AIR BEARING;
COORDINATES UNIFICATION;
EFFICIENCY IMPROVEMENT;
FORM ERRORS;
HIGH REPETITION RATE;
HIGH-SPEED;
LASER INTERFEROMETER;
MATHEMATIC MODEL;
MEASURING METHOD;
NANOMETRICS;
OPTICAL DELAY;
OPTICAL DELAY LINES;
POSITION SENSORS;
SCANNING RESOLUTION;
SINGLE POINT DIAMOND TURNING;
ULTRA PRECISION;
BEARINGS (MACHINE PARTS);
HOLOGRAPHIC DISPLAYS;
HOLOGRAPHIC INTERFEROMETRY;
INTERFEROMETERS;
LASER INTERFEROMETRY;
LIGHTING;
MILLING MACHINES;
MIRRORS;
OPTICAL TOMOGRAPHY;
SCANNING;
SENSORS;
SPECKLE;
TECHNOLOGY;
TURNING;
UNITS OF MEASUREMENT;
WAVES;
MANUFACTURE;
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EID: 84862911034
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.911858 Document Type: Conference Paper |
Times cited : (2)
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References (11)
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