Generation of optical vortex using a spiral phase plate fabricated in quartz by direct laser writing and inductively coupled plasma etching

Chinese Physics Letters

Volumn 26, Issue 1, 2009, Pages

  Chen, Jun ^a,b   Kuang, Deng Feng ^a   Gui, Min ^a   Fang, Zhi Liang ^a  

^a NANKAI UNIVERSITY   (China)

^b TAISHAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

INDUCTIVELY COUPLED PLASMA; PHOTORESISTS; QUARTZ; TOPOLOGY; VORTEX FLOW;

BEAM INTENSITY; DIRECT LASER WRITING; INDUCTIVELY COUPLED PLASMA ETCHING; INTENSITY DISTRIBUTION; OPTICAL VORTICES; PERFORMANCE; QUARTZ SUBSTRATE; SIMPLE++; SPIRAL PHASE PLATES; TOPOLOGICAL CHARGES;

FABRICATION;

EID: 66149129227     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/26/1/014202     Document Type: Article

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