Capacitive humidity sensors based on the dielectrophoretically manipulated ZnO nanorods

Sensors and Actuators, A: Physical

Volumn 178, Issue , 2012, Pages 88-93

  Chen, Leping ^a   Zhang, Jian ^b  

^a YANTAI UNIVERSITY   (China)

^b EAST CHINA NORMAL UNIVERSITY   (China)

Author keywords

Dielectrophoresis; Humidity; Nanorods; Sensor; ZnO

Indexed keywords

CAPACITIVE HUMIDITY SENSORS; DIELECTROPHORETIC MANIPULATION; FAST RESPONSE; GOOD STABILITY; HIGH HUMIDITY; MICROMACHINED; NANO-STRUCTURED; REPRODUCIBILITIES; SENSING ELEMENTS; ZNO; ZNO NANOROD; ZNO NANOSTRUCTURES;

ATMOSPHERIC HUMIDITY; DECOMPOSITION; ELECTROPHORESIS; HUMIDITY SENSORS; NANORODS; SENSORS;

ZINC OXIDE;

EID: 84862796764     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.02.030     Document Type: Article

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