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Materials Chemistry and Physics

Volumn 133, Issue 2-3, 2012, Pages 987-991

Design and fabrication of micro hydrogen gas sensors using palladium thin film

(3) Yoon, Jin Ho a Kim, Bum Joon a Kim, Jung Sik a

a University of Seoul (South Korea)

Author keywords

Electrical characterization; Electrical properties; Sputtering; Thin films

Indexed keywords

ELECTRICAL CHARACTERIZATION; FINITE-ELEMENTS METHOD; GAS SENSITIVITY; HIGHLY SENSITIVE; HYDROGEN CONCENTRATION; HYDROGEN GAS; HYDROGEN GAS SENSORS; MEASURED DATA; MICRO-HEATERS; OPERATING TEMPERATURE; PD THIN FILMS; RADIO FREQUENCIES; SENSING LAYERS; SIMULATION DATA;

CHEMICAL SENSORS; ELECTRIC PROPERTIES; ELECTROMECHANICAL DEVICES; FABRICATION; GAS DETECTORS; MEMS; SPUTTERING; THIN FILMS;

HYDROGEN;

EID: 84862784288 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/j.matchemphys.2012.02.002 Document Type: Article

Times cited : (43)

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