Ultrasensitive Pd-Ag/ZnO/Nickel alloy-based metal-insulator-metal methane sensor on micromachined silicon substrate

IEEE Sensors Journal

Volumn 12, Issue 7, 2012, Pages 2526-2527

  Roy, Sunipa ^a   Sarkar, Chandan Kumar ^a   Bhattacharyya, Partha ^b  

^a JADAVPUR UNIVERSITY   (India)

^b INDIAN INSTITUTE OF ENGINEERING SCIENCE AND TECHNOLOGY   (India)

Author keywords

High sensitivity; methane sensor; micro electromechanical systems; Ni alloy microheater; Pd Ag ZnO nickel alloy metal insulator metal structure

Indexed keywords

CATALYTIC ELECTRODES; FAST RESPONSE; HIGH SENSITIVITY; LOW TEMPERATURE CHEMICAL PROCESS; LOW TEMPERATURES; METAL INSULATOR METALS; METAL-INSULATOR-METAL STRUCTURES; METHANE CONCENTRATIONS; METHANE DETECTION; METHANE SENSOR; MICROHEATER; MICROMACHINED SILICON; MIM STRUCTURE; MINIMUM TIME; NANO-STRUCTURED; OPTIMUM TEMPERATURE; RESPONSE MAGNITUDE; RESPONSE/RECOVERY TIME; SENSING LAYERS; ULTRAHIGH SENSITIVITY; ULTRASENSITIVE; ZNO;

ALLOYS; CURRENT VOLTAGE CHARACTERISTICS; HEATING EQUIPMENT; MEMS; METHANATION; METHANE; MICROELECTROMECHANICAL DEVICES; OHMIC CONTACTS; SENSORS; TEMPERATURE; ZINC ALLOYS; ZINC OXIDE;

MIM DEVICES;

EID: 84862023494     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2012.2195166     Document Type: Article

References (7)

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