Black Silicon for solar cell applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8438, Issue , 2012, Pages

  Kroll, Matthias ^a   Otto, Martin ^b   Kasebier, Thomas ^a   Fuchsel, Kevin ^a,c   Wehrspohn, Ralf ^b,d   Kley, Ernst Bernhard ^a   Tunnermann, Andreas ^a,c   Pertsch, Thomas ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

^c FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^d FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

Author keywords

Anti reflection coating; Black Silicon; Crystalline silicon; Light trapping; Solar cells

Indexed keywords

ABSORPTION EDGES; BLACK SILICON; BROAD SPECTRAL; CELL THICKNESS; CRYSTALLINE SILICONS; DIELECTRIC COATINGS; EXPERIMENTAL INVESTIGATIONS; FUNCTIONALIZATIONS; LIGHT TRAPPING EFFECTS; LIGHT-TRAPPING; NEEDLE-LIKE; OPTICAL PERFORMANCE; PHOTON MANAGEMENT; PHOTOVOLTAIC APPLICATIONS; PHOTOVOLTAIC SYSTEMS; PROCESS PARAMETERS; RANDOMLY DISTRIBUTED; SOLAR CELL EFFICIENCIES; SOLAR-CELL APPLICATIONS; SUBSTRATE THICKNESS; THREE-DIMENSIONAL MODEL;

ASPECT RATIO; CRYSTALLINE MATERIALS; DIELECTRIC MATERIALS; OPTICAL PROPERTIES; PHOTOVOLTAIC EFFECTS; SOLAR CELLS; SOLAR CONCENTRATORS; SULFUR HEXAFLUORIDE; THREE DIMENSIONAL;

BLACK COATINGS;

EID: 84861941963     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.922380     Document Type: Conference Paper

References (25)

1. Hering, G., "Year of the tiger," Photon International 3/2011, 186-218 (2011).
2. del Canizo, C., del Coso, G., and Sinke, W.C., "Crystalline silicon solar module technology: Towards the 1 € per watt-peak goal," Prog. Photovoltaics: Res. Appl. 17, 199-209 (2009).
3. Zhao, J., Wang, A., Altermatt, P., Wenham, S., and Green, M.A., "24% efficient PERL silicon solar cell: Recent improvements in high efficiency silicon cell research," Sol. Energy Mater. Sol. Cells 41-42, 87-99 (1996).
4. Zhao, J., Wang, A., Green, M.A., and Ferrazza, F., "19.8% efficient 'honeycomb' textured multicrystalline and 24.4% monocrystalline silicon solar cells," Appl. Phys. Lett. 73, 1991-1993 (1998).
5. King, D.L., and Buck, M.E., "Experimental optimization of an anisotropic etching process for random texturization of silicon solar cells," in 22nd IEEE Photovoltaic Specialists Conference, 303-308 (1991).
6. Papet, P., Nichiporuk, O., Kaminski, A., Rozier, Y., Kraiem, J., Lelievre, J.-F., Chaumartin, A., Fave, A., and Lemiti, M., "Pyramidal texturing of silicon solar cell with TMAH chemical anisotropic etching," Sol. Energy Mater. Sol. Cells 90, 2319-2328 (2006).
7. Kroll, M., Kasebier, T., Otto, M., Salzer, R., Wehrspohn, R.B., Kley, E.-B., Tunnermann, A., and Pertsch, T., "Optical modeling of needle like silicon surfaces produced by an ICP-RIE process," in Proc. SPIE 7725 - Photonics for Solar Energy Systems III, 772505 (2010).
8. Singh, R., Green, M.A., and Rajkanan, K., "Review of conductor-insulator-semiconductor (CIS) solar cells," Solar Cells 3, 95-148 (1981).
9. Fuchsel, K., Bingel, A., Kaiser, N., and Tunnermann, A., "Transparent conductive oxides for nano-SIS solar cells," in Proc. SPIE 8065 - Eco-Photonics 2011, 80650B (2011).
10. Jansen, H., de Boer, M., Legtenberg, R., and Elwenspoek, M., "The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control," Journal of Micromechanics and Microengineering 5, 115 (1995).
11. Mellhaoui, X., Dussart, R., Tillocher, T., Lefaucheux, P., Ranson, P., Boufnichel, M., and Overzet, L.J., "Si- OxFy passivation layer in silicon cryoetching," J. Appl. Phys. 98, 104901 (2005).
12. Otto, M., Kroll, M., Kasebier, T., Lee, S.-M., Putkonen, M., Salzer, R., Miclea, P.T., and Wehrspohn, R.B., "Conformal Transparent Conducting Oxides on Black Silicon.," Adv. Mater. 22, 5035-8 (2010).
13. Yablonovitch, E., "Statistical ray optics," J. Opt. Soc. Am. 72, 899-907 (1982).
14. Bohren, C.F., and Huffman, D.R., [Absorption and Scattering of Light by Small Particles], Wiley-VCH, Weinheim (2004).
15. Li, L., "Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings," J. Opt. Soc. Am. A 13, 1024-1035 (1996).
16. Li, L., "New formulation of the Fourier modal method for crossed surface-relief gratings," J. Opt. Soc. Am. A 14, 2758-2767 (1997).
17. Kim, K., Mandel, L., and Wolf, E., "Relationship between Jones and Mueller matrices for random media," J. Opt. Soc. Am. A 4, 433 (1987).
18. Green, M.A., "Self-consistent optical parameters of intrinsic silicon at 300 K including temperature coefficients," Sol. Energy Mater. Sol. Cells 92, 1305-1310 (2008).
19. Cotter, J.E., "Raysim 6.0 - a free geometrical ray tracing program for silicon solar cells," in 31st IEEE Photovoltaic Specialists Conference, 1165-1168 (2005).
20. ASTM G173-03, [Standard Tables for Reference Solar Spectral Irradiances: Direct Normal and Hemispherical on 37° Tilted Surface], ASTM International, West Conshohocken, PA (2008).
21. Green, M.A., "Limits on the open-circuit voltage and efficiency of silicon solar cells imposed by intrinsic Auger processes," IEEE T. Electron. Dev. 31, 671-678 (1984).
22. Tiedje, T., Yablonovitch, E., and Cody, G.D., "Limiting Efficiency of Silicon Solar Cells," IEEE T. Electron. Dev. 31, 711-716 (1984).
23. Nelson, J., [The Physics of Solar Cells], Imperial College Press, London (2003).
24. Shockley, W., and Queisser, H.J., "Detailed Balance Limit of Efficiency of p-n Junction Solar Cells," J. Appl. Phys. 32, 510-519 (1961).
25. Kerr, M.J., and Cuevas, A., "General parameterization of Auger recombination in crystalline silicon," J. Appl. Phys. 91, 2473-2480 (2002).