Vacuum deposited WO 3 thin films based sub-ppm H 2S sensor

Materials Chemistry and Physics

Volumn 134, Issue 2-3, 2012, Pages 851-857

  Datta, Niyanta ^a   Ramgir, Niranjan ^a   Kaur, Manmeet ^a   Roy, Mainak ^a   Bhatt, Ranu ^a   Kailasaganapathi, S ^a   Debnath, A K ^a   Aswal, D K ^a   Gupta, S K ^a  

^a BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

Defects; Surface properties; Thin films; Vacuum deposition

Indexed keywords

AU LOADING; ENHANCED SENSITIVITY; GAS CONCENTRATION; OPERATING TEMPERATURE; OPTIMUM CONDITIONS; RESPONSE KINETICS; SENSING PROPERTY; SENSITIVITY VALUES; SENSOR FILMS; SIMPLE METHOD; THIN FILM SENSORS; WORK FUNCTION MEASUREMENTS;

DEFECTS; GOLD; LOADING; SURFACE PROPERTIES; TEMPERATURE; THIN FILMS; VACUUM DEPOSITION;

SENSORS;

EID: 84861530207     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2012.03.080     Document Type: Article

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