Compositional analysis and depth profiling of thin film CrO 2 by heavy ion ERDA and standard RBS: A comparison

Materials Characterization

Volumn 70, Issue , 2012, Pages 42-47

  Khamlich, S ^a,b,c   Msimanga, M ^a   Pineda Vargas, C A ^a,d   Nuru, Z Y ^a   McCrindle, R ^b   Maaza, M ^a,b,c  

^a ITHEMBA LABS   (South Africa)

^b TSHWANE UNIVERSITY OF TECHNOLOGY   (South Africa)

^c African Laser Centre   (South Africa)

^d CPUT   (South Africa)

Author keywords

Chromium dioxide; HI ERDA; RBS

Indexed keywords

APPLIED RESEARCH; ATOMIC SPECIES; CHROMIUM DIOXIDE; COMPOSITIONAL ANALYSIS; DEPOSITED FILMS; DEPTH DISTRIBUTION; ELEMENTAL CONTENTS; HEAVY-ION ELASTIC RECOIL DETECTION ANALYSIS; HI-ERDA; NUCLEAR ANALYTICAL TECHNIQUES; POLYCRYSTALLINE STRUCTURE; POLYCRYSTALLINE THIN FILM; QUANTITATIVE INFORMATION; RBS; RUTHERFORD BACKSCATTERING SPECTROMETRY; SI SUBSTRATES; SYNTHESIS TECHNIQUES; TECHNOLOGICAL APPLICATIONS; XRD ANALYSIS;

CHROMIUM; ELECTRON BEAMS; HEAVY IONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROMETRY; STOICHIOMETRY;

THIN FILMS;

EID: 84861474746     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2012.05.003     Document Type: Article

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