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Sensors and Actuators, B: Chemical

Volumn 166-167, Issue , 2012, Pages 815-818

Self-aligned process for the development of surface stress capacitive biosensor arrays

(6) Tsouti, V a,b Filippidou, M K b Boutopoulos, C c Broutas, P a Zergioti, I c Chatzandroulis, S a

a INSTITUTE OF MICROELECTRONICS (Greece)

b Terma Patriarchou Grigoriou (Greece)

c NATIONAL TECHNICAL UNIVERSITY OF ATHENS (Greece)

Author keywords

Biosensor array fabrication; Capacitive micro membranes; Self alignment; Silicon fusion bonding

Indexed keywords

BIOLOGICAL INTERACTIONS; BIOSENSING; BIOSENSOR ARRAYS; CAPACITIVE BIOSENSORS; CAPACITIVE MICRO-MEMBRANES; FABRICATION PROCESS; FLEXIBLE MEMBRANES; FUSION BONDING; MEMBRANE SURFACE; PROBE MOLECULES; SELF ALIGNED PROCESS; SELF ALIGNMENT; SURFACE STRESS;

ALIGNMENT; MEMBRANES; OLIGONUCLEOTIDES; SENSORS; SURFACE PROPERTIES;

BIOSENSORS;

EID: 84861187002 PISSN: 09254005 EISSN: None Source Type: Journal
DOI: 10.1016/j.snb.2011.12.028 Document Type: Article

Times cited : (8)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.