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Volumn , Issue , 2011, Pages 001754-001757

A novel way to characterize metal-insulator-metal devices via nanoindentation

Author keywords

[No Author keywords available]

Indexed keywords

BASE LAYERS; CONTACT AREAS; CURRENT-VOLTAGE RESPONSE; DEVICE PERFORMANCE; ELECTRICAL CONTACT RESISTANCE; ELECTRICALLY CONDUCTIVE; IN-SITU; METAL INSULATOR METALS; METAL INSULATORS; METAL TIP; MIM DIODES; MIM STRUCTURE; NANOINDENTERS; NON-LINEARITY; PRECISE CONTROL; PROBE TIPS; RECTENNAS; SI SUBSTRATES; VERY HIGH FREQUENCY;

EID: 84861058088     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2011.6186293     Document Type: Conference Paper
Times cited : (9)

References (10)
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  • 5
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  • 7
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.