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Volumn , Issue , 2011, Pages 001754-001757
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A novel way to characterize metal-insulator-metal devices via nanoindentation
a,b a b b b a,b |
Author keywords
[No Author keywords available]
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Indexed keywords
BASE LAYERS;
CONTACT AREAS;
CURRENT-VOLTAGE RESPONSE;
DEVICE PERFORMANCE;
ELECTRICAL CONTACT RESISTANCE;
ELECTRICALLY CONDUCTIVE;
IN-SITU;
METAL INSULATOR METALS;
METAL INSULATORS;
METAL TIP;
MIM DIODES;
MIM STRUCTURE;
NANOINDENTERS;
NON-LINEARITY;
PRECISE CONTROL;
PROBE TIPS;
RECTENNAS;
SI SUBSTRATES;
VERY HIGH FREQUENCY;
DIAMONDS;
DIODES;
MATERIALS PROPERTIES;
METAL INSULATOR BOUNDARIES;
METALS;
NANOINDENTATION;
PHOTOVOLTAIC EFFECTS;
POINT CONTACTS;
WIRE;
MIM DEVICES;
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EID: 84861058088
PISSN: 01608371
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/PVSC.2011.6186293 Document Type: Conference Paper |
Times cited : (9)
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References (10)
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