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Volumn , Issue , 2011, Pages 002826-002828

High mobility tin oxide deposition with methanol addition

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION; BENEFICIAL EFFECTS; CHEMICAL VAPOR DEPOSITION REACTORS; COATED GLASS; DEPOSITION PROCESS; FILM TRANSPARENCY; HIGH MOBILITY; MAIN EFFECT; OXIDE DEPOSITION; OXYGEN PRECURSORS; POINT FLOWS;

EID: 84861047195     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2011.6186533     Document Type: Conference Paper
Times cited : (1)

References (10)
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    • Y. Matsui, M. Mitsuhashi, Y. Yamamoto, and S. Higashi "Influence of alcohol on grain growth of tin oxide in chemical vapor deposition" Thin Solid Films, 515 (2007),2854.
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    • Matsui, Y.1    Mitsuhashi, M.2    Yamamoto, Y.3    Higashi, S.4
  • 5
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    • Electrical conduction in 10-20 nm thick polycrystalline tin oxide thin films deposited by chemical vapor deposition
    • Y. Matsui and Y. Yamamoto "Electrical conduction in 10-20 nm thick polycrystalline tin oxide thin films deposited by chemical vapor deposition" Thin Solid Films 517 (2009), 2953.
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    • Deposition of boron doped zinc oxide and their electrical and optical properties
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  • 9
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    • Carrier transport in polycrystalline transparent conductive oxides: A comparative study of zinc oxide and indium oxide
    • K. Ellmer and R. Mientus "Carrier transport in polycrystalline transparent conductive oxides: A comparative study of zinc oxide and indium oxide" Thin Solid Films 516 (2008), 4620.
    • (2008) Thin Solid Films , vol.516 , pp. 4620
    • Ellmer, K.1    Mientus, R.2
  • 10
    • 39349104529 scopus 로고    scopus 로고
    • In situ spectroscopic ellipsometry growth studies on the Al-doped ZnO films deposited by remote plasmaenhanced metalorganic chemical vapor deposition
    • I. Volintiru, M. Creatore, and M. C. M. van de Sanden "In situ spectroscopic ellipsometry growth studies on the Al-doped ZnO films deposited by remote plasmaenhanced metalorganic chemical vapor deposition" J. Appl. Phys. 103 (2008), 033704.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.