Fabrication of stretchable and flexible electrodes based on PDMS substrate

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 247-250

  Chou, Namsun ^a   Yoo, Soonki ^a   Kim, Sohee ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION-TAPE TEST; CONTACT LAYERS; ELECTRICAL STABILITY; FABRICATION METHOD; FLEXIBLE ELECTRODES; MECHANICALLY STABLE; MEMS APPLICATIONS; METAL LAYER; METAL PATTERNS; PARYLENES; PDMS SUBSTRATE; PUSH PULL; TEST MODULES; THIN FILM LAYERS;

ADHESION; ELECTRODES; MEMS; MICROCHANNELS; STRETCHING;

FABRICATION;

EID: 84860472643     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170137     Document Type: Conference Paper

References (4)

1. S. Heo, "Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers", Nature materials, Vol. 9, pp. 859-864, 2010.
2. S. Heo, K. Song, M. choi, T. Sung, D. Moon, "Patternable solution process for fabrication of flexible polymer solar cells using PDMS", Solar Energy Materials And Solar Cells, Vol. 9, pp. 3564-3572, 2011.
3. L. Guo, S. P. DeWeerth, "PDMS-based conformable microelectrode arrays with selectable novel 3-D microelectrode geometries for surface stimulation and recording", Int. Conf. of the IEEE Engineering in Medicine and Biology Society, Minneapolis, Minnesota, USA, September 2-6, 2003, pp. 1623-1626.
4. ASTM international, "Standard test methods for measuring adhesion by tape test," D3359-09.