High-Q, 3kHz Single-Crystal-Silicon Cylindrical Rate-Integrating Gyro (CING)

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 172-175

  Cho, J ^a   Gregory, J A ^a   Najafi, K ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALLAN VARIANCE; DAMPING TIME; HIGH ASPECT RATIO; HYBRID FPGA; MEMS GYROSCOPE; RANDOM WALK; SILICON-ON-GLASS; SINGLE CRYSTAL SILICON; SOFTWARE CONTROL;

ASPECT RATIO; GYROSCOPES; SENSORS; SILICON;

MEMS;

EID: 84860469218     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170121     Document Type: Conference Paper

References (5)

1. D. D. Lynch, "Vibratory gyro analysis by the method of averaging," 2nd St. Petersburg Int. Conf. on Gyro. Tech. and Navigation, St. Petersburg, Russia, 1995.
2. J. Cho, J. A. Gregory, K. Najafi, "Single-Crystal-Silicon Vibratory Cylindrical Rate Integrating Gyroscope (CING)," Transducers'11, pp. 2813-2816, Beijing, China, June 5-9, 2011.
3. J. A. Gregory, J. Cho, K. Najafi, "Rate and rate-integrating gyroscope control with commercial software defined radio hardware," in Transducers'11, pp. 2394-2397, Beijing, China, June 5-9, 2011.
4. I. P. Prikhodko, S. A. Zotov, A. A. Trusov, and A. M. Shkel, "Foucault Pendulum on a Chip: Angle Measuring Silicon MEMS Gyroscope," MEMS'11, Cancun, Mexico, January 23-27, 2011, pp. 161-164.
5. R. Liftshitz and M.L. Roukes, "Thermoelastic damping in micro and nanomechanical systems," Phys. Rev. B, vol. 61, n. 8, 2000, pp. 5600-5609.