Integration of piezoelectric energy scavengers with FBAR resonators for the miniaturization of autonomous wireless sensors nodes

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 1253-1256

  Murillo, G ^a   Campanella, H ^b   Agusti, J ^a   Esteve, J ^b   Abadal, G ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION TECHNOLOGIES; FILM BULK ACOUSTIC RESONATORS; INTEGRATED CIRCUITRY; MONOLITHIC INTEGRATION; PIEZOELECTRIC ENERGY; POWER DENSITIES; RESONANCE FREQUENCIES; WIRELESS SENSOR; WIRELESS SENSOR NETWORK (WSN);

MEMS; MONOLITHIC INTEGRATED CIRCUITS; PIEZOELECTRICITY; SENSOR NODES;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 84860467709     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170198     Document Type: Conference Paper

References (5)

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2. G. Murillo, J. Agusti, G. Abadal, F. Torres, J. Giner, E. Marigó, A. Uranga, N. Barniol, "Integration of an improved Harvester-on-Chip core dice on commercial SOI-based MEMS technology", in 9th International PowerMEMS Workshop, Washington D.C., USA, 2009.
3. S. Roundy, P.K. Wright, J.M. Rabaey, "Energy Scavenging for Wireless Sensor Networks: With Special Focus on Vibrations", Springer, 2004.
4. H. Campanella Pineda, "Thin-film bulk acoustic wave resonators-FBAR: fabrication, heterogeneous integration with CMOS technologies and sensor applications", Universitat Autònoma de Barcelona, 2008.
5. H. Campanella, A. Uranga, A. Romano-Rodriguez, J. Montserrat, G. Abadal, N. Barniol, J. Esteve, "Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects", Sensor Actuat a-Phys, 142 (2008) 322-328.