Recovery of phosphoric acid from mixed waste acids of semiconductor industry by diffusion dialysis and vacuum distillation

Separation and Purification Technology

Volumn 90, Issue , 2012, Pages 64-68

  Kim, Ju Yup ^a,b   Shin, Chang Hoon ^a   Choi, Hyungjoo ^a   Bae, Wookeun ^b  

^a Daeil Development Co Ltd   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

Aluminum; Diffusion dialysis; Mixed waste acids; Phosphoric acid; Vacuum distillation

Indexed keywords

ACID CONCENTRATIONS; AL-CONCENTRATION; ANION EXCHANGE MEMBRANE; DIFFUSION DIALYSIS; ETCHING PROCESS; FEED SOLUTION; MIXED WASTES; MULTITARGET; OPERATING CONDITION; OPERATIONAL TEMPERATURE; RECOVERY YIELD; SEMICONDUCTOR INDUSTRY; VACUUM DISTILLATION; VACUUM PRESSURE; WATER FLOW RATE;

ACETIC ACID; ALUMINUM; DIALYSIS; DIALYSIS MEMBRANES; DIFFUSION; DISTILLATION; MOLYBDENUM; PHOSPHORIC ACID; RECOVERY; SEMICONDUCTOR DEVICE MANUFACTURE; VACUUM;

NITRIC ACID;

EID: 84860229693     PISSN: 13835866     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.seppur.2012.02.013     Document Type: Article

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