A solvent extraction approach to recover acetic acid from mixed waste acids produced during semiconductor wafer process

Journal of Hazardous Materials

Volumn 162, Issue 2-3, 2009, Pages 1278-1284

  Shin, Chang Hoon ^a   Kim, Ju Yup ^a,c   Kim, Jun Young ^a   Kim, Hyun Sang ^b   Lee, Hyang Sook ^a   Mohapatra, Debasish ^a   Ahn, Jae Woo ^d   Ahn, Jong Gwan ^e   Bae, Wookeun ^c  

^a Daeil Development Co Ltd   (South Korea)

^b R and D Team   (South Korea)

^c Hanyang University   (South Korea)

^d Daejin University   (South Korea)

^e Korea Institute of Geosceince and Mineral Resources   (South Korea)

Author keywords

2 Ethylhexyl alcohol; Acetic acid; Mixed waste acid; Solvent extraction

Indexed keywords

ACETIC ACID; BATCH DATA PROCESSING; DEIONIZED WATER; FIBER OPTIC SENSORS; HYDROFLUORIC ACID; METAL ANALYSIS; NITRIC ACID; ORGANIC COMPOUNDS; ORGANIC SOLVENTS; PH; PH EFFECTS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SODIUM; SOLVENT EXTRACTION; SOLVENTS; STRIPPING (DYES);

2-ETHYLHEXYL ALCOHOL; ACETIC ACID RECOVERIES; AND RECOVERIES; BATCH PROCESSES; BATCH TESTS; COMMERCIAL APPLICATIONS; COMMERCIAL GRADES; CONTINUOUS OPERATIONS; EQUILIBRIUM CONDITIONS; ETCHING SOLUTIONS; EXTRACTION SYSTEMS; MARKET VALUES; MATERIAL BALANCES; MIXED WASTE ACID; PROCESS FLOWSHEET; SEMICONDUCTOR WAFER PROCESSES; SILICON WAFER MANUFACTURING; STRIPPING AGENTS; WASTE SOLUTIONS;

EXTRACTION;

2 ETHYLHEXANOL; ACETIC ACID; FLUORIDE; HYDROFLUORIC ACID; SILICON;

ACETIC ACID; ETCHING; EXTRACTION; PRECIPITATION (CHEMISTRY); SEMICONDUCTOR INDUSTRY; SOLVENT;

ARTICLE; MIXER; PRECIPITATION; SOLVENT EXTRACTION; SYNTHESIS;

ACETIC ACID; ACIDS; SEMICONDUCTORS; SOLVENTS; X-RAY DIFFRACTION;

EID: 57649167449     PISSN: 03043894     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jhazmat.2008.06.029     Document Type: Article

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