Flexible microassembly methods for micro/nanofluidic chips with an inverted microscope

Microelectronic Engineering

Volumn 97, Issue , 2012, Pages 1-7

  Xu, Zheng ^a   Wang, Jun Yao ^a   Wang, De Jia ^a   Liu, Chong ^a   Liu, Yun Liang ^a   Liu, Jun Shan ^a   Wang, Li Ding ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Alignment; Micro nanofluidic chip; Microassembly

Indexed keywords

FLEXIBLE ASSEMBLY; MECHANICAL PARTS; MICRO ASSEMBLY; MICRO/NANOFLUIDIC CHIP; NANO CHANNELS;

ALIGNMENT; MAGNETIC MATERIALS;

MICROELECTRONICS;

EID: 84860207753     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.02.040     Document Type: Article

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