Multi-ant colony-based sequencing method for semiconductor wafer fabrication facilities with multi-bottleneck

International Journal of Modelling, Identification and Control

Volumn 15, Issue 4, 2012, Pages 259-266

  Li, Li ^a  

^a TONGJI UNIVERSITY   (China)

Author keywords

ACO; Ant colony optimisation; Batch processing; Bottleneck; Semiconductor manufacturing; Sequencing

Indexed keywords

ARTIFICIAL INTELLIGENCE; BATCH DATA PROCESSING; FABRICATION; QUALITY CONTROL; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

BATCH PROCESSING MACHINE; BOTTLENECK; MULTI BOTTLENECKS; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR WAFER FABRICATION; SEQUENCING; SEQUENCING METHOD; TOTAL-WEIGHTED TARDINESS;

ANT COLONY OPTIMIZATION;

EID: 84859556479     PISSN: 17466172     EISSN: 17466180     Source Type: Journal    
DOI: 10.1504/IJMIC.2012.046404     Document Type: Article

References (17)

1. Celano, G., Costa, A. and Fichera, S. (2010) 'Constrained scheduling of the inspection activities on semiconductor wafers grouped in families with sequence-dependent set-up times', International Journal of Advanced Manufacturing Technology, Vol. 46, Nos. 5-8, pp. 695-705.
2. Chien, C.F. and Chen, C.H. (2007) 'A novel timetabling algorithm for a furnace process for semiconductor fabrication with constrained waiting and frequency-based setups', OR Spectrum, Vol. 29, No. 3, pp. 391-419.
3. Chou, F.D.., Wang, H.M. and Chang, P.C. (2008) 'A simulated annealing approach with probability matrix for semiconductor dynamic scheduling problem', Expert Systems with Applications, Vol. 35, No. 4, pp. 1889-1898.
4. Dorigo, M. (1992) 'Ottimizzazione, apprendimento automatico, ed algoritmi basati su metafora naturale (optimization, learning and natural algorithms)', PhD thesis, p.140, Politecnico di Milano, Italy, in Italian.
5. Dorigo, M. and Stützle, T. (2004) Ant Colony Optimization, MIT Press/Bradford Books, Cambridge, MA.
6. Jerald, H., Delp, D., Donal C. and Jennie, S. (2002) 'Understanding a semiconductor process using a full-scale model', IEEE Transactions on Semiconductor Manufacturing, Vol. 15, No. 2, pp. 285-289. (Pubitemid 34669744)
7. Kempf, K. (2004) 'Intel five machine six step mini-fab description', available at http://aar.faculty.asu.edu/research/ intel/papers/fabspec.html.
8. Kumar, P.R. (1993) 'Re-entrant lines', Special Issue on Queueing Networks, Vol. 13, No. 1, pp. 87-110.
9. Li, L., Qiao, F., Tian, X.Y. and Wu, Q.D. (2009) 'Ant colony optimization based scheduling for a wafer fab with bottleneck stations', IEEE International Conference on Automation and Logistics, 5-7 August, pp. 520-525, Shenyang, China.
10. Liu, M. and Wu, C. (2004) 'Genetic algorithm using sequence rule chain for multi-objective optimization in re-entrant micro-electronic production line', Robotics and Computer- Integrated Manufacturing, Vol. 20, No. 3, pp. 225-236.
11. Mahmoudi, A., Bessedik, M. and Drias, H. (2010) 'Two hybrid ant algorithms for the general T-colouring problem', International Journal of Bio-Inspired Computation, Vol. 2, No. 5, pp. 353-362.
12. Mohammad, R.B. and Hamed, S.H. (2010) 'A dynamic max-min ant system for solving the travelling salesman problem', International Journal of Bio-Inspired Computation, Vol. 2, No. 6, pp. 422-433.
13. Mönch, L., Balasubramanian, H., Fowler, J.W. et al. (2005) 'Heuristic scheduling of jobs on parallel batch machines with incompatible job families and unequal ready times', Computers & Operations Research, Vol. 32, No. 11, pp. 2731-2750. (Pubitemid 40244545)
14. Song, Y., Zhang, M.T., Yi, J.G., Zhang, L. and Zheng, L. (2007) 'Bottleneck station scheduling in semiconductor assembly and test manufacturing using ant colony optimization', IEEE Transactions on Automation Science and Engineering, Vol. 4, No. 4, pp. 569-578. (Pubitemid 47573851)
15. Wein, L.M. (1988) 'Scheduling semiconductor wafer fabrication', IEEE Transactions on Semiconductor Manufacturing, Vol. 1, No. 1, pp. l15-129.
16. Wu, M.C. and Chiou, C.W. (2010) 'Scheduling semiconductor in-line steppers in new product/process introduction scenarios', International Journal of Production Research, Vol. 48, No. 6, pp. 1835-1852.
17. Yacine, L. and Habiba, D. (2010) 'ACO approach with learning for preemptive scheduling of real-time tasks', International Journal of Bio-Inspired Computation, Vol. 2, No. 6, pp. 383-394.