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Applied Surface Science

Volumn 258, Issue 15, 2012, Pages 5593-5598

Characterization of indium tin oxide films by RF-assisted DC magnetron sputtering

(2) Houng, Boen a Wang, Adam a,b

a I SHOU UNIVERSITY (Taiwan)

b Emerging Display Technologies Corporation (Taiwan)

Author keywords

Grain boundary scattering; ITO films; PET (polyethylene terephtalate)

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC CONDUCTIVITY; ENERGY TRANSFER; FLOW OF GASES; GRAIN BOUNDARIES; INDIUM COMPOUNDS; MICROSTRUCTURE; OXYGEN; POLYETHYLENES; TIN OXIDES;

DC MAGNETRON SPUTTERING; ELECTRICAL CONDUCTION MECHANISMS; GRAIN BOUNDARY SCATTERING; INDIUM TIN OXIDE FILMS; ITO (INDIUM-TIN OXIDE); ITO FILMS; POLYETHYLENE TEREPHTALATE; POROUS MICROSTRUCTURE;

OXIDE FILMS;

EID: 84859162635 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2012.02.030 Document Type: Article

Times cited : (19)

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