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Volumn , Issue , 2002, Pages 485-489

Characterization and optimization of inorganic Spin on Glass process for inter-metal dielectric using field emission scanning electron microscopy

Author keywords

[No Author keywords available]

Indexed keywords

CMP PROCESS; CVD PROCESS; DIFFERENT SPEED; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; HOT PLATES; INTER-LAYER DIELECTRIC MATERIALS; INTER-METAL DIELECTRIC LAYERS; INTER-METAL DIELECTRICS; NARROW GAP; PLANARIZATION; PROCESS PROCEDURES; PROCESS SCHEMES; RAMPING RATE; SPIN ON GLASS; SPIN SPEED; TEMPERATURE TREATMENTS; VERTICAL FURNACES;

EID: 84859070231     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (3)
  • 3
    • 0033149013 scopus 로고    scopus 로고
    • The fabrication on nonplanar spin on glass microstructure
    • June
    • R. Liu, M. Vasile and D. Beebe, " The fabrication on Nonplanar Spin on Glass Microstructure", Journal of Microelectromechanical Systems, vol, 8, no. 2, pp. 146-151, June 1999.
    • (1999) Journal of Microelectromechanical Systems , vol.8 , Issue.2 , pp. 146-151
    • Liu, R.1    Vasile, M.2    Beebe, D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.