SRRs Embedded with MEMS Cantilevers to Enable Electrostatic Tuning of the Resonant Frequency

Experimental Mechanics

Volumn 52, Issue 4, 2012, Pages 395-403

  Moore, E A ^a   Langley, D ^a   Jussaume, M E ^a   Rederus, L A ^a   Lundell, C A ^a   Coutu, R A ^a   Collins, P J ^a   Starman, L A ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cantilever; MEMS; Metamaterials; Microelectromechanical systems; Split ring resonator; SRR; Varactors

Indexed keywords

CAPACITANCE; ELECTROSTATICS; EMBEDDED SYSTEMS; MEMS; METAMATERIALS; MICROMECHANICS; NANOCANTILEVERS; NATURAL FREQUENCIES; OPTICAL RESONATORS; RING GAGES; TUNING; ELECTROMECHANICAL DEVICES; VARACTORS;

APPLIED VOLTAGES; CANTILEVER; CANTILEVER ARRAYS; ELECTROSTATIC TUNING; GAP REGIONS; RESONANT FREQUENCY SHIFT; SPLITRING RESONATORS; TWO BEAMS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); SPLIT RING RESONATOR; SPLIT-RING RESONATORS (SRR); SRR;

VARACTORS; NATURAL FREQUENCIES;

EID: 84858401359     PISSN: 00144851     EISSN: 17412765     Source Type: Journal    
DOI: 10.1007/s11340-011-9498-8     Document Type: Article

References (25)

1. Pendry JB (2000) Negative refraction makes a perfect lens. Phys Rev Lett 85: 3966-3969.
2. Pendry JB, Schrig D, Smith DR (2006) Controlling electromagnetic fields. Science 312: 17801782.
3. Veselago VG (1968) The electrodynamics of substances with simultaneously negative values of ε and μ. Sov Phys Usp 10: 509-514.
4. Pendry JB, Holden AJ, Robbins DJ, Stewart WJ (1998) Low frequency plasmons in thin wire structures. J Phys Condens Matter 10: 4785-4809.
5. Pendry JB, Holden AJ, Robbins DJ, Stewart WJ (1999) Magnetism from conductors and enhanced non linear phenomena. IEEE Trans Microwave Theor Tech 47: 2075-2084.
6. Ekemkci E, Turhan-Sayan G (2009) Comparative investigation of resonance characteristics and electrical size of the double-sided SRR, BC-SRR, and conventional SRR type metamaterials for varying substrate parameters. Prog Elertomagn Res B 12: 35-62.
7. Zhao Q, Kang L, Du B, Li B, Zhou J, Tang H, Liang X, Zhang B (2007) Electrically tunable negative permeability metamaterials based on nematic liquid crystals. Appl Phys Lett 90: 011112.
8. Xiao S, Chettiar U, Klidshev A, Drachev V, Khoo IC, Shalaev V (2009) Tunable magnetic response of metamaterials. Appl Phys Lett 95: 033115.
9. Reynet O, Acher O (2004) Voltage controlled metamaterial. Appl Phys Lett 84: 1198-1200.
10. Gil I, Bonache J, Garcia-Garcia J, Martin F (2006) Tunable metamaterial transmission lines based on varactor-loaded split-ring resonators. IEEE Trans Microwave Theor Tech 54: 2665-2674.
11. Chen H, Wu B, Ran L, Grzegorczyk TM, Kong JA (2006) Controllable left-handed metamaterial and its application to a steerable antenna. Appl Phys Lett 89: 053509.
12. Aydin K, Ozbay E (2007) Capacitor-loaded split ring resonators as tunable metamaterial components. J Appl Phys 101: 024911.
13. Gil M, Damm C, Giere A, Sazegar M, Bonache J, Jakoby R, Martin F (2009) Electrically tunable split ring resonators at microwave frequencies based on barium-strontium-titanate thick films. Eletron Lett 45: 417-418.
14. Chen HT, O'Hara JF, Azad AK, Taylor AJ, Averitt RD, Shrekenhamer D, Padilla WJ (2008) Experimental demonstration of frequency-agile terahertz metamaterials. Nat Photonics 2: 295-298.
15. Boulais KA, Rule DW, Simmons S, Santiago F, Gehman V, Long K, Rayms-Keller A (2008) Tunable split-ring resonator for metamaterials using photocapacitance of semi-insulating GaAs. Appl Phys Lett 93: 043518.
16. Han J, Lakhtakia A, Qui CW (2008) Terahertz metamaterials with semiconductor split-ring resonators for magnetostatic tunability. Opt Express 16: 14390.
17. Gil I, Martin F, Rottenberg X, De Raedt W (2007) Tunable stop-band filter at Q-band based on RF-MEMS metamaterials. Electron Lett 43: 1153-1154.
18. Hand T, Cummer S (2007) Characterization of tunable metamaterial elements using MEMS switches. IEEE Antennas Wirel Propag Lett 6: 401-404.
19. Langley D, Coutu RA, Starman LA (2010) MEMS integrated metamaterial structure capable of variable resonance for RF applications. 11th International Symposium MEMS and Nanotechnology. SEM Annual Conference, Indianapolis, IN, 7-10 June.
20. Smith D, Vier DC, Koschny T, Soukoulis CM (2005) Electromagnetic parameter retrieval from inhomogeneous metamaterials. Phys Rev E 71: 036617.
21. Finot E, Passian A, Thundat T (2008) Measurement of mechanical properties of cantilever shaped materials. Sensors 8(5): 3497-3541.
22. Madou M (1997) Fundamentals of microfabrication. CRC, New York, p 300.
23. Coutu RA Jr, Collins PJ, Moore EA, Langley D, Jussaume ME, Starman LA (2011) Electrostatically tunable meta-atoms integrated with in-situ fabricated MEMS cantilever beam arrays. Submitted to the IEEE/ASME J MEMS, Submitted Sept 10, revised and resubmitted Feb 11.
24. Lou JK, Lin M, Fu YQ, Wang L, Flewitt AJ, Spearing SM, Fleck NA, Milne WI (2006) MEMS based digital variable capacitors with high-k dielectric insulator. Sens Actuators A 132: 139-146.
25. CST Microwave Studio® version 2010. 05 (2010) http:/www. cst. com.