Electrostatically tunable meta-atoms integrated with in situ fabricated MEMS cantilever beam arrays

Journal of Microelectromechanical Systems

Volumn 20, Issue 6, 2011, Pages 1366-1371

  Coutu Jr , Ronald A ^a   Collins, Peter J ^a   Moore, Elizabeth A ^b   Langley, Derrick ^a   Jussaume, Matthew E ^c   Starman, Lavern A ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

^b Wyle Labs   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Cantilever; meta atom; microelectromechanical systems (MEMS); split ring resonators (SRRs)

Indexed keywords

BEAM GEOMETRY; CANTILEVER; CANTILEVER ARRAYS; ELECTROSTATIC TUNING; GAP CAPACITANCE; IN-SITU; META-ATOM; MICROELECTROMECHANICAL SYSTEMS (MEMS); SPLIT RING RESONATOR;

ATOMS; FABRICATION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICS; NANOCANTILEVERS; NATURAL FREQUENCIES; OPTICAL RESONATORS;

RING GAGES;

EID: 82455212128     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2167659     Document Type: Article

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