Laser and focused ion beam combined machining for micro dies

Review of Scientific Instruments

Volumn 83, Issue 2, 2012, Pages

  Yoshida, Y ^a   Okazaki, W ^a   Uchida, T ^a  

^a TOYO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSED ION BEAMS; MOLDS; NEEDLES; OPTICAL GLASS; PRESSES (MACHINE TOOLS); SURFACE ROUGHNESS;

COMBINED MACHINING; FOCUS POSITIONS; HOLE WALLS; MICRO-LENS ARRAYS; MICRONEEDLES; PRESS MOLDS; ROUGHNESS OF SURFACE; SILICON RUBBERS; THROUGH HOLE; UV LASERS;

DIES;

CARBON; GLASS;

ARTICLE; CHEMISTRY; INSTRUMENTATION; LASER; MICROTECHNOLOGY; OPTICAL INSTRUMENTATION;

CARBON; GLASS; LASERS; LENSES; MICROTECHNOLOGY;

EID: 84857870710     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3662018     Document Type: Article

References (4)

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2. Y. Yoshida, T. Masuzawa, H. Ikeda, K. Oguchi, H. Yamagishi, and Y. Wakabayashi, Rev. Sci. Instrum. 81, 02B702 (2010). 10.1063/1.3258427
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