Development of a local vacuum system for focused ion beam machining

Review of Scientific Instruments

Volumn 80, Issue 7, 2009, Pages

  Masuzawa, Tsuneaki ^a   Yoshida, Yoshikazu ^b   Ikeda, Hiromichi ^c   Oguchi, Keigo ^c   Yamagishi, Hikaru ^c   Wakabayashi, Yuji ^c  

^a Hiraide Precision Co Ltd   (Japan)

^b TOYO UNIVERSITY   (Japan)

^c Nagano Prefecture General Industrial Technology Center   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM LINES; CURRENT FLOWS; FOCUS ADJUSTMENT; FOCUSED ION BEAM MACHINING; SHAPE RECOGNITION; VACUUM APPARATUS; VACUUM SYSTEM; VISUALIZATION SYSTEM; WORK PIECES;

CYLINDERS (SHAPES); MACHINING; VACUUM;

FOCUSED ION BEAMS;

ARTICLE; CONFOCAL MICROSCOPY; INSTRUMENTATION; MICROTECHNOLOGY; PRESSURE; TIME; VACUUM;

MICROSCOPY, CONFOCAL; MICROTECHNOLOGY; PRESSURE; TIME FACTORS; VACUUM;

EID: 68949083242     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3186060     Document Type: Article

References (5)

1. F. Houlihan, M. Kunnavakham, A. Liddle, P. Mirau, O. Nalamasu, and J. Rogers, J. Photopolym. Sci. Technol. 0914-9244 15, 497 (2002). 10.2494/photopolymer.15.497
2. T. Sato, H. Watanabe, S. Shibata, T. Tomotoshi, Y. Narutaki, Y. Itoh, and K. Okamoto, SID Int. Symp. Digest Tech. Papers 38, 1274 (2007). 10.1889/1.2785544
3. M. Takahashi, K. Sugimoto, and R. Maeda, Jpn. J. Appl. Phys., Part 1 0021-4922 44, 5600 (2005). 10.1143/JJAP.44.5600 (Pubitemid 43182966)
4. S. Kallee, J. Kell, W. Thomas, and C. Wiesner, Proceedings of the DVS Annual Welding Conference, Essen, Germany, September 2005 (unpublished), pp. 12-14.
5. S. Westgate, Welding and Cutting 2, 256 (2003).