Scaling issues in ferroelectric barium strontium titanate tunable planar capacitors

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 59, Issue 2, 2012, Pages 198-204

  Lam, Peter G ^a   Haridasan, Vrinda ^a   Feng, Zhiping ^a   Steer, Michael B ^a   Kingon, Angus I ^a   Maria, Jon Paul ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE VALUES; EDGE-TO-EDGE; EXPERIMENTAL MEASUREMENTS; FERROELECTRIC SURFACES; GAP DISTANCES; GAP LENGTH; GAP WIDTHS; INTERDIGITATED CAPACITORS; MICROMETER RANGES; PARASITIC ELEMENT; PLANAR CAPACITORS; TUNABILITIES; X BANDS;

FERROELECTRIC MATERIALS;

ELECTROLYTIC CAPACITORS;

EID: 84857830380     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2012.2179     Document Type: Article

References (14)

1. N. Setter, D. Damjanovic, L. Eng, S. Fox, S. Gevorgian, S. Hong, A. Kingon, H. Kohlstedt, N. Y. Park, G. B. Stephenson, I. Stolitchnov, A. K. Taganstev, D. V. Taylor, T. Yamada, and S. Streiffer, "Ferroelectric thin films: Review of materials, properties, and applications," J. Appl. Phys., vol. 83, no. 5, pp. 1-46, Sep. 2006.
2. A. Tombak, J.-P. Maria, F. T. Ayguavives, Z. Jin, G. T. Stauf, A. Kingon, and A. Mortazawi, "Voltage-controlled RF filters employing thin-film barium-strontium-titanate tunable capacitors," IEEE Trans. Microw. Theory Tech., vol. 51, no. 2, pp. 462-467, Feb. 2003.
3. 3 thin films used for integrated capacitors in microwave applications," in Proc. 12th IEEE Int. Symp. Applications of Ferroelectrics, Honolulu, HI, 2000, pp. 365-368. (Pubitemid 34684153)
4. J. Nath, D. Ghosh, J.-P. Maria, A. Kingon, W. Fathelbab, P. D. Franzon, and M. B. Steer, "An electronically tunable microstrip bandpass filter using thin-film barium-strontium-titanate (BST) varactors," IEEE Trans. Microw. Theory Tech., vol. 51, no. 9, pp. 2707-2712, Sep. 2005. (Pubitemid 41633193)
5. 3 thin films with AlGaN/GaN HEMT circuits," IEEE Electron Device Lett., vol. 25, no. 2, pp. 49-51, Feb. 2004.
6. 3 thin films," IEEE Microw. Wireless Compon. Lett., vol. 12, no. 7, pp. 237-239, Jul. 2002. (Pubitemid 34861790)
7. 3 interdigitated capacitors for distributed phase shifter applications," IEEE Microw. Guided Wave Lett, vol. 10, no. 11, pp. 448-450, Nov. 2000. (Pubitemid 32130854)
8. L. Sengupta and S. Sengupta, "Novel ferroelectric materials for phased array antennas," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 44, no. 4, pp. 792-797, Jul. 1997. (Pubitemid 127771266)
9. J. Sigman, C. D. Nordquist, P. G. Clem, G. M. Kraus, and P. S. Finnegan, "Voltage-controlled Ku-band and X-band tunable combline filters using barium-strontium-titanate," IEEE Trans. Microw. Wireless Compon. Lett, vol. 18, no. 9, pp. 593-595, Sep. 2008.
10. P. G. Lam, Z. P. Feng, V. Haridasan, A. Kingon, M. B. Steer, and J.-P. Maria, "The impact of metallization thickness and geometry for X-band tunable microwave filters," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 56, no. 5, pp. 906-911, May 2009.
11. V. Haridasan, P. G. Lam, Z. Feng, W. M. Fathelbab, J.-P. Maria, A. Kingon, and M. B. Steer, "Tunable ferroelectric microwave bandpass filters optimized for system-level integration," IET Microw. Antennas Propag., vol. 5, no. 10, pp. 1234-1241, Jul. 2011.
12. 3 capacitors fabricated on low-cost substrates with copper metallization," Thin Solid Films, vol. 496, no. 2, pp. 669-673, Feb. 2006. (Pubitemid 41691037)
13. G. Velu, K. Blary, L. Burgnies, A. Marteau, G. Houzet, D. Lippens, and J.-C. Carru, "A 360° BST phase shifter with moderate bias voltage at 30 GHz," IEEE Trans. Microw. Theory Tech., vol. 55, no. 2, pp. 438-444, Feb. 2007.
14. 3 thin films in the GHz frequency range," Appl. Phys. Lett., vol. 83, no. 25, pp. 5274-5276, Dec. 2003.